Inventor · disambiguated record
Kazunaga Ono
Also filed as: ONO KAZUNAGA
4 granted patents·5 pending applications·1 citations·filing 2003–2023
55Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
9 records- 0181US11939665B2Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming methodTOKYO ELECTRON LTD·Filed 2021·Granted Mar 26, 2024·1 cites·28 claims
- 0259US12180580B2Film forming position misalignment correction method and film forming systemTOKYO ELECTRON LTD·Filed 2023·Granted Dec 31, 2024·0 cites·13 claims
- 0359US12018928B2Film thickness measurement method, film thickness measurement device, and film formation systemTOKYO ELECTRON LTD·Filed 2022·Granted Jun 25, 2024·0 cites·20 claims
- 0452US11404255B2Sputtering method and sputtering apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 2, 2022·0 cites·20 claims
- 0552US2020123649A1Oxidation processing module, substrate processing system, and oxidation processing methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0644US2015114835A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0737US2022098717A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0836US2005099111A1Method for the preparation of graphite nanofibers and emitter and display elements comprising the nanofibersFiled 2003·Application pending·0 cites
- 0930US2016071707A1Processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →