Inventor · disambiguated record

Katgenahalli Y. Ramanujam

Also filed as: RAMANUJAM KATGENAHALLI Y

2 granted patents·53 citations·filing 2000–2002

64Inventor score

Technology areasB24B

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0191US6475332B1Interlocking chemical mechanical polishing systemLAM RES CORP·Filed 2000·Granted Nov 5, 2002·44 cites·13 claims
0258US6666755B1Belt wiper for a chemical mechanical planarization systemLAM RES CORP·Filed 2002·Granted Dec 23, 2003·9 cites·18 claims

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