Inventor · disambiguated record
Kazunari Sakata
Also filed as: SAKATA KAZUNARI
15 granted patents·1 pending application·1,619 citations·filing 1991–2018
95Inventor score
Top patents by PatentIndex Score
16 records- 0196US5261167AVertical heat treating apparatusTEL SAGAMI LTD·Filed 1991·Granted Nov 16, 1993·362 cites·7 claims
- 0295US5447294AVertical type heat treatment systemTOKYO ELECTRON LTD·Filed 1994·Granted Sep 5, 1995·493 cites·22 claims
- 0394US5556275AHeat treatment apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Sep 17, 1996·389 cites·19 claims
- 0487US5261935AClean air apparatusTEL SAGAMI LTD·Filed 1993·Granted Nov 16, 1993·112 cites·11 claims
- 0586US10679878B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 9, 2020·5 cites·5 claims
- 0686US7819658B2Heat treatment system and method thereforeTOKYO ELECTRON LTD·Filed 2007·Granted Oct 26, 2010·9 cites·7 claims
- 0786US6419482B1Opening and closing apparatus of an opening and closing lid of a box accommodating an object to be processed and a processing system of an object to be processedFiled 2000·Granted Jul 16, 2002·39 cites·9 claims
- 0881US6729823B2Processing system for object to be processedTOKYO ELECTRON LTD·Filed 2001·Granted May 4, 2004·26 cites·18 claims
- 0978US7059849B2Heat treatment system and a method for cooling a loading chamberTOKYO ELECTRON LTD·Filed 2001·Granted Jun 13, 2006·19 cites·5 claims
- 1077US5181819AApparatus for processing semiconductorsTEL SAGAMI LTD·Filed 1991·Granted Jan 26, 1993·63 cites·10 claims
- 1165US5219464AClean air apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Jun 15, 1993·37 cites·19 claims
- 1254US5207578AHeat processing apparatus of vertical typeTOYKO ELECTRON SAGAMI LIMITED·Filed 1992·Granted May 4, 1993·19 cites·19 claims
- 1353US2009301656A1Microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1448US5951282AVertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Sep 14, 1999·17 cites·20 claims
- 1547US6042372AHeat treatment apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Mar 28, 2000·15 cites·20 claims
- 1644US5226812AVertical type heat-treating apparatusTEL SAGAMI LTD·Filed 1992·Granted Jul 13, 1993·14 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →