Inventor · disambiguated record
Kazusige Sano
Also filed as: SANO KAZUSIGE
2 granted patents·1 citations·filing 2018–2019
30Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0167US10840081B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Granted Nov 17, 2020·1 cites·19 claims
- 0235US11152234B2Weighing apparatus, substrate liquid processing apparatus, weighing method, substrate liquid processing method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Oct 19, 2021·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →