Inventor · disambiguated record
Katja Schick
Also filed as: SCHICK KATJA
0 granted patents·4 pending applications·0 citations·filing 2025–2025
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0160US2025389873A1Optical element for reflection of radiation in the vuv wavelength regionZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0258US2025271783A1Method for operating an optical system, and optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0352US2025230535A1Method and device for forming a fluoride or oxylfluoride layer for an optical element for the vuv wavelength range, and optical element comprising said fluoride or oxylfluoride layerZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0447US2025257458A1Method and apparatus for atomic layer deposition of a fluoride layer, optical element and optical arrangementZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →