Inventor · disambiguated record
Kartik Shah
Also filed as: SHAH KARTIK · SHAH KARTIK B · SHAH KARTIK BHUPENDRA
68 granted patents·24 pending applications·142 citations·filing 2012–2025
98Inventor score
Top patents by PatentIndex Score
92 records- 0195US11584993B2Thermally uniform deposition stationAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·4 cites·18 claims
- 0295US11049696B2Dogbone inlet cone profile for remote plasma oxidation chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jun 29, 2021·3 cites·20 claims
- 0394US11959169B2Asymmetric injection for better wafer uniformityAPPLIED MATERIALS INC·Filed 2022·Granted Apr 16, 2024·2 cites·10 claims
- 0493USD959490SDisplay screen or portion thereof with graphical user interfaceAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·36 cites·1 claims
- 0593US10062598B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Aug 28, 2018·7 cites·12 claims
- 0693US2025364306A1Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0792US11486038B2Asymmetric injection for better wafer uniformityAPPLIED MATERIALS INC·Filed 2020·Granted Nov 1, 2022·3 cites·20 claims
- 0892US10636626B2Dogbone inlet cone profile for remote plasma oxidation chamberAPPLIED MATERIALS INC·Filed 2018·Granted Apr 28, 2020·3 cites·13 claims
- 0992US10626500B2Showerhead designAPPLIED MATERIALS INC·Filed 2019·Granted Apr 21, 2020·7 cites·20 claims
- 1092US9845550B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Dec 19, 2017·7 cites·20 claims
- 1190US11735447B2Enhanced process and hardware architecture to detect and correct realtime product substratesAPPLIED MATERIALS INC·Filed 2020·Granted Aug 22, 2023·2 cites·20 claims
- 1290US11732355B2Method and apparatus for supplying improved gas flow to a processing volume of a processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Aug 22, 2023·5 cites·20 claims
- 1390US11586160B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·2 cites·20 claims
- 1490US10930543B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Feb 23, 2021·4 cites·17 claims
- 1589US11818810B2Heater assembly with purge gap control and temperature uniformity for batch processing chambersAPPLIED MATERIALS INC·Filed 2021·Granted Nov 14, 2023·2 cites·8 claims
- 1689US10047457B2EPI pre-heat ringAPPLIED MATERIALS INC·Filed 2014·Granted Aug 14, 2018·4 cites·15 claims
- 1787US12091749B2Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outletAPPLIED MATERIALS INC·Filed 2021·Granted Sep 17, 2024·1 cites·18 claims
- 1887USD1037778SGas distribution plateAPPLIED MATERIALS INC·Filed 2022·Granted Aug 6, 2024·13 cites·1 claims
- 1986US12400904B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 2086US12060651B2Chamber architecture for epitaxial deposition and advanced epitaxial film applicationsAPPLIED MATERIALS INC·Filed 2021·Granted Aug 13, 2024·1 cites·20 claims
- 2186US11501954B2Dogbone inlet cone profile for remote plasma oxidation chamberAPPLIED MATERIALS INC·Filed 2021·Granted Nov 15, 2022·1 cites·20 claims
- 2286US10325763B2Physical vapor deposition processing systems target coolingAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·2 cites·19 claims
- 2386US2025354250A1Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2483US11171023B2Diode laser for wafer heating for EPI processesAPPLIED MATERIALS INC·Filed 2016·Granted Nov 9, 2021·4 cites·20 claims
- 2582US10221483B2Showerhead designAPPLIED MATERIALS INC·Filed 2015·Granted Mar 5, 2019·3 cites·11 claims
- 2681US12371776B2Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
- 2781US2025201534A1Baffle implementation for improving bottom purge gas flow uniformityAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2880US11586789B2Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·1 cites·13 claims
- 2980US10269614B2Susceptor design to reduce edge thermal peakAPPLIED MATERIALS INC·Filed 2015·Granted Apr 23, 2019·3 cites·15 claims
- 3080US2024337020A1Gas injector for epitaxy and cvd chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3179US12443175B2Eco-efficiency (sustainability) dashboard for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2024·Granted Oct 14, 2025·0 cites·18 claims
- 3277US10132003B2Heating modulators to improve epi uniformity tuningAPPLIED MATERIALS INC·Filed 2017·Granted Nov 20, 2018·2 cites·22 claims
- 3377US2025246461A1Multi-zone lamp heating and temperature monitoring in epitaxy process chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3476US10000847B2Graphite susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Jun 19, 2018·2 cites·17 claims
- 3575US11848226B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2021·Granted Dec 19, 2023·0 cites·7 claims
- 3675US11807931B2Chamber injectorAPPLIED MATERIALS INC·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
- 3774US11077410B2Gas injector with baffleAPPLIED MATERIALS INC·Filed 2018·Granted Aug 3, 2021·1 cites·19 claims
- 3874US10458040B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Oct 29, 2019·1 cites·20 claims
- 3973US11835927B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2022·Granted Dec 5, 2023·0 cites·20 claims
- 4073US2025275015A1Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 4172US11781212B2Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·0 cites·16 claims
- 4272US10232324B2Gas mixing apparatusAPPLIED MATERIALS INC·Filed 2013·Granted Mar 19, 2019·3 cites·17 claims
- 4371USD1071103SGas distribution plateAPPLIED MATERIALS INC·Filed 2022·Granted Apr 15, 2025·5 cites·1 claims
- 4471US12018372B2Gas injector for epitaxy and CVD chamberAPPLIED MATERIALS INC·Filed 2021·Granted Jun 25, 2024·0 cites·20 claims
- 4570US12324061B2Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2021·Granted Jun 3, 2025·0 cites·20 claims
- 4670US11492704B2Chamber injectorAPPLIED MATERIALS INC·Filed 2019·Granted Nov 8, 2022·0 cites·20 claims
- 4770US9111980B2Gas exhaust for high volume, low cost system for epitaxial silicon depositionAPPLIED MATERIALS INC·Filed 2012·Granted Aug 18, 2015·2 cites·20 claims
- 4869US12183553B2Baffle implementation for improving bottom purge gas flow uniformityAPPLIED MATERIALS INC·Filed 2020·Granted Dec 31, 2024·0 cites·14 claims
- 4968US11529592B2Gas injector with baffleAPPLIED MATERIALS INC·Filed 2021·Granted Dec 20, 2022·0 cites·20 claims
- 5068US10619235B2Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamberAPPLIED MATERIALS INC·Filed 2017·Granted Apr 14, 2020·1 cites·11 claims
Showing the top 50 of 92 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →