Inventor · disambiguated record
Katsuhiko Tokushige
Also filed as: TOKUSHIGE KATSUHIKO
6 granted patents·1 pending application·96 citations·filing 2000–2017
83Inventor score
Top patents by PatentIndex Score
7 records- 0195US7040968B2Polishing apparatusEBARA CORP·Filed 2005·Granted May 9, 2006·28 cites·12 claims
- 0290US6939208B2Polishing apparatusEBARA CORP·Filed 2001·Granted Sep 6, 2005·42 cites·18 claims
- 0377US7207864B2Polishing apparatusEBARA CORP·Filed 2006·Granted Apr 24, 2007·4 cites·12 claims
- 0474US6667238B1Polishing method and apparatusEBARA CORP·Filed 2000·Granted Dec 23, 2003·15 cites·13 claims
- 0562US10500691B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2017·Granted Dec 10, 2019·0 cites·18 claims
- 0662US7101259B2Polishing method and apparatusTOSHIBA KK·Filed 2003·Granted Sep 5, 2006·7 cites·15 claims
- 0734US2005191858A1Substrate processing method and apparatusFiled 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Katsuhiko Tokushige files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →