Inventor · disambiguated record
Kazutoshi Yano
Also filed as: YANO KAZUTOSHI
4 granted patents·2 pending applications·95 citations·filing 1998–2013
78Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0187US6248168B1Spin coating apparatus including aging unit and solvent replacement unitTOKYO ELECTRON LTD·Filed 1998·Granted Jun 19, 2001·63 cites·12 claims
- 0285US6589339B2Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2001·Granted Jul 8, 2003·26 cites·12 claims
- 0364US6726775B2Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2003·Granted Apr 27, 2004·6 cites·6 claims
- 0453US2006292298A1Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 0544US7205024B2Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2004·Granted Apr 17, 2007·0 cites·12 claims
- 0639US2015228512A1Substrate treatment method, computer-readable storage medium, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →