Inventor · disambiguated record
Kazutoshi Yoshioka
Also filed as: YOSHIOKA KAZUTOSHI
14 granted patents·1,226 citations·filing 1987–2001
95Inventor score
Files withTOKYO ELECTRON LTD14
Top patents by PatentIndex Score
14 records- 0195US4812201AMethod of ashing layers, and apparatus for ashing layersTOKYO ELECTRON LTD·Filed 1987·Granted Mar 14, 1989·481 cites·4 claims
- 0293US5968691AMethod and apparatus for coating resist and developing the coated resistTOKYO ELECTRON LTD·Filed 1998·Granted Oct 19, 1999·93 cites·11 claims
- 0392US5460478AMethod for processing wafer-shaped substratesTOKYO ELECTRON LTD·Filed 1995·Granted Oct 24, 1995·123 cites·14 claims
- 0489US6002108ABaking apparatus and baking methodTOKYO ELECTRON LTD·Filed 1998·Granted Dec 14, 1999·69 cites·9 claims
- 0589US5364222AApparatus for processing wafer-shaped substratesTOKYO ELECTRON LTD·Filed 1993·Granted Nov 15, 1994·107 cites·21 claims
- 0688US6051349AApparatus for coating resist and developing the coated resistTOKYO ELECTRON LTD·Filed 1999·Granted Apr 18, 2000·60 cites·13 claims
- 0786US6551400B2Coating apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Apr 22, 2003·21 cites·7 claims
- 0886US6228561B1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 1997·Granted May 8, 2001·36 cites·17 claims
- 0984US6503003B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Jan 7, 2003·19 cites·5 claims
- 1083US5938847AMethod and apparatus for coating a film on an object being processedTOKYO ELECTRON LTD·Filed 1997·Granted Aug 17, 1999·58 cites·17 claims
- 1179US5297910ATransportation-transfer device for an object of treatmentTOKYO ELECTRON LTD·Filed 1992·Granted Mar 29, 1994·70 cites·10 claims
- 1277US6261744B1Baking apparatus and baking methodTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·33 cites·6 claims
- 1366US6168667B1Resist-processing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Jan 2, 2001·32 cites·26 claims
- 1463US6268013B1Coating a resist film, with pretesting for particle contaminationTOKYO ELECTRON LTD·Filed 1999·Granted Jul 31, 2001·24 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →