Inventor · disambiguated record
Kazuhiro Zama
Also filed as: HACHIYA LEGAL REPRESENTATIVE RIEKO · MIYAZAKI YUSUKE · ZAMA KAZUHIRO
15 granted patents·4 pending applications·37 citations·filing 2006–2020
90Inventor score
Top patents by PatentIndex Score
19 records- 0183US7925390B2Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of spaceHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 12, 2011·14 cites·1 claims
- 0281US7723709B2Substrate holding apparatus, and inspection or processing apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted May 25, 2010·6 cites·8 claims
- 0379US7746461B2Optical defect inspection apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 29, 2010·4 cites·5 claims
- 0477US8686383B2Object holding apparatus, and inspection apparatusZAMA KAZUHIRO·Filed 2012·Granted Apr 1, 2014·3 cites·16 claims
- 0574US8310667B2Wafer surface inspection apparatus and wafer surface inspection methodZAMA KAZUHIRO·Filed 2008·Granted Nov 13, 2012·4 cites·45 claims
- 0672US7420668B2Wafer surface inspection apparatus and wafer surface inspection methodHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 2, 2008·3 cites·6 claims
- 0766US7999242B2Substrate holding apparatus, and inspection or processing apparatusHITACHI HIGH TECH CORP·Filed 2010·Granted Aug 16, 2011·1 cites·14 claims
- 0858US8203705B2Inspection apparatus and inspection methodOOYAMA MASAMI·Filed 2009·Granted Jun 19, 2012·2 cites·40 claims
- 0951US2011102781A1Optical defect inspection apparatusHITACHI HIGH TECH CORP·Filed 2011·Application pending·0 cites
- 1051US2007211241A1Optical defect inspection apparatusAIZAWA NORIYUKI·Filed 2007·Application pending·0 cites
- 1150US8183549B2Substrate holding apparatus, and inspection or processing apparatusZAMA KAZUHIRO·Filed 2011·Granted May 22, 2012·0 cites·31 claims
- 1250US7894052B2Optical defect inspection apparatusHITACHI HIGH TECH CORP·Filed 2010·Granted Feb 22, 2011·0 cites·5 claims
- 1350US2011153114A1Mini Environment Apparatus, Inspection Apparatus, Manufacturing Apparatus and Cleaning Method of SpaceHITACHI HIGH TECH CORP·Filed 2011·Application pending·0 cites
- 1449US10674073B2Imaging methodTOYOTA MOTOR CO LTD·Filed 2018·Granted Jun 2, 2020·0 cites·5 claims
- 1547US8472016B2Optical defect inspection apparatusIIJIMA YUUICHIRO·Filed 2012·Granted Jun 25, 2013·0 cites·18 claims
- 1646US11159718B2Imaging methodTOYOTA MOTOR CO LTD·Filed 2020·Granted Oct 26, 2021·0 cites·5 claims
- 1744US8184283B2Optical defect inspection apparatusIIJIMA YUUICHIRO·Filed 2010·Granted May 22, 2012·0 cites·19 claims
- 1842US8537351B2Inspection apparatus and inspection methodOOYAMA MASAMI·Filed 2012·Granted Sep 17, 2013·0 cites·15 claims
- 1941US2008024773A1Surface inspection apparatus and surface inspection methodMIYAZAKI YUSUKE·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →