Inventor · disambiguated record
Kenneth Allen Aitchison
Also filed as: AITCHISON KENNETH · AITCHISON KENNETH ALLEN
3 granted patents·4 pending applications·474 citations·filing 1996–2023
73Inventor score
Files withAITCHISON KENNETH2EDWARDS LTD2BAILEY CHRISTOPHER MARK1NOVELLUS SYSTEMS INC1ULTRA CLEAN HOLDINGS INC1
Top patents by PatentIndex Score
7 records- 0193US5928426AMethod and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactorsNOVELLUS SYSTEMS INC·Filed 1996·Granted Jul 27, 1999·468 cites·51 claims
- 0270US8382909B2Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection systemEDWARDS LTD·Filed 2005·Granted Feb 26, 2013·4 cites·11 claims
- 0370US7638106B2Method of treating a gas streamEDWARDS LTD·Filed 2006·Granted Dec 29, 2009·2 cites·9 claims
- 0454US2023234106A1Coating removal system and methods of operating sameULTRA CLEAN HOLDINGS INC·Filed 2023·Application pending·0 cites
- 0545US2013125788A1Low-volatility compounds for use in forming deposited layersAITCHISON KENNETH·Filed 2013·Application pending·0 cites
- 0643US2011048283A1Low-volatility compounds for use in forming deposited layersAITCHISON KENNETH·Filed 2008·Application pending·0 cites
- 0728US2011017140A1Method of treating a gas streamBAILEY CHRISTOPHER MARK·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →