Inventor · disambiguated record
Keh-Jeng Chang
Also filed as: CHANG KEH-JENG
46 granted patents·14 pending applications·898 citations·filing 1995–2025
98Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD47SEQUENCE DESIGN INC6TAIWAN SEMICONDUCTOR MFG3FREQUENCY TECHNOLOGY INC2DOONG YIH-YUH1
Top patents by PatentIndex Score
60 records- 0198US11335606B2Power rails for stacked semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 17, 2022·8 cites·20 claims
- 0297US11960210B2Laser interference fringe control for higher EUV light source and EUV throughputTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 16, 2024·2 cites·20 claims
- 0396US11903188B2Memory devices, semiconductor devices, and methods of operating a memory deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 13, 2024·2 cites·20 claims
- 0496US11592749B2Laser interference fringe control for higher EUV light source and EUV throughputTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 28, 2023·2 cites·20 claims
- 0596US6643831B2Method and system for extraction of parasitic interconnect impedance including inductanceSEQUENCE DESIGN INC·Filed 2002·Granted Nov 4, 2003·275 cites·28 claims
- 0695US11437371B2Field effect transistors with negative capacitance layersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 6, 2022·3 cites·20 claims
- 0794US5610833AComputer-aided design methods and apparatus for multilevel interconnect technologiesHEWLETT PACKARD CO·Filed 1995·Granted Mar 11, 1997·208 cites·10 claims
- 0892US11928416B2Semiconductor process technology assessmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 12, 2024·2 cites·20 claims
- 0992US11604915B2Semiconductor process technology assessmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 14, 2023·3 cites·20 claims
- 1092US11276604B1Radical-activated etching of metal oxidesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 15, 2022·2 cites·20 claims
- 1191US11150559B2Laser interference fringe control for higher EUV light source and EUV throughputTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 19, 2021·2 cites·20 claims
- 1289US11594616B2Field effect transistor with negative capacitance dielectric structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 28, 2023·1 cites·20 claims
- 1389US2025329544A1Plasma-assisted etching of metal oxidesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1488US7772868B2Accurate capacitance measurement for ultra large scale integrated circuitsTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Aug 10, 2010·9 cites·7 claims
- 1588US2025331092A1Extreme ultraviolet radiation source, method of generating extreme ultraviolet radiation, and method of manufacturing integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1686US11502199B2Independent control of stacked semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 15, 2022·1 cites·20 claims
- 1785US12389518B2Method of manufacturing integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 12, 2025·0 cites·20 claims
- 1885US12317535B2Independent control of stacked semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted May 27, 2025·0 cites·20 claims
- 1985US11282711B2Plasma-assisted etching of metal oxidesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 22, 2022·1 cites·20 claims
- 2085US11114547B2Field effect transistor with negative capacitance dieletric structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 7, 2021·2 cites·20 claims
- 2184US12363978B2Field effect transistor with negative capacitance dielectric structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 15, 2025·0 cites·20 claims
- 2284US2025323085A1Radical-activated etching of metal oxidesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2383US11791397B2Field effect transistor with negative capacitance dielectric structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 17, 2023·0 cites·20 claims
- 2482US12501701B2Power rails for stacked semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 16, 2025·0 cites·20 claims
- 2582US8115500B2Accurate capacitance measurement for ultra large scale integrated circuitsDOONG YIH-YUH·Filed 2011·Granted Feb 14, 2012·5 cites·11 claims
- 2682US6291254B1Methods for determining on-chip interconnect process parametersSEQUENCE DESIGN INC·Filed 1999·Granted Sep 18, 2001·49 cites·19 claims
- 2782US2025261397A1Independent Control Of Stacked Semiconductor DeviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2881US6057171AMethods for determining on-chip interconnect process parametersFREQUENCY TECHNOLOGY INC·Filed 1997·Granted May 2, 2000·48 cites·6 claims
- 2980US12211918B2Nanostructured channel regions for semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 28, 2025·0 cites·20 claims
- 3080US6381730B1Method and system for extraction of parasitic interconnect impedance including inductanceSEQUENCE DESIGN INC·Filed 1999·Granted Apr 30, 2002·88 cites·32 claims
- 3180US5901063ASystem and method for extracting parasitic impedance from an integrated circuit layoutFREQUENCY TECHNOLOGY INC·Filed 1997·Granted May 4, 1999·104 cites·74 claims
- 3279US12299375B2Semiconductor process technology assessmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted May 13, 2025·0 cites·20 claims
- 3379US12027605B2Field effect transistors with negative capacitance layersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 2, 2024·0 cites·20 claims
- 3479US2025238592A1Semiconductor process technology assessmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 3578US11916145B2Independent control of stacked semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 27, 2024·0 cites·20 claims
- 3678US2024371839A1Heat Dissipation in Semiconductor Packages and Methods of Forming SameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3778US2024387673A1Nanostructured channel regions for semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3877US12074148B2Heat dissipation in semiconductor packages and methods of forming sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 27, 2024·0 cites·20 claims
- 3977US11854910B2Power rails for stacked semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
- 4077US6403389B1Method for determining on-chip sheet resistivitySEQUENCE DESIGN INC·Filed 1999·Granted Jun 11, 2002·42 cites·10 claims
- 4176US12387968B2Radical-activated etching of metal oxidesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 12, 2025·0 cites·20 claims
- 4276US6312963B1Methods for determining on-chip interconnect process parametersSEQUENCE DESIGN INC·Filed 1999·Granted Nov 6, 2001·36 cites·4 claims
- 4375US12284804B2Memory devices, semiconductor devices, and methods of operations a memory deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Apr 22, 2025·0 cites·20 claims
- 4475US11769818B2Field effect transistors with negative capacitance layersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 26, 2023·0 cites·20 claims
- 4575US2024395637A1Methods for real time etch process compensation controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4675US2024387139A1Voltage control for etching systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4774US2022216064A1Plasma-assisted etching of metal oxidesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 4872US2024290836A1Gate Structures For Semiconductor DevicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4971US11869954B2Nanostructured channel regions for semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 9, 2024·0 cites·20 claims
- 5069US12513912B2Method for fabricating an integrated circuit comprising devices on opposing sides of a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 30, 2025·0 cites·20 claims
Showing the top 50 of 60 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →