Inventor · disambiguated record
Keiko Chiba
Also filed as: CHIBA KEIKO `
40 granted patents·6 pending applications·482 citations·filing 1986–2024
98Inventor score
Top patents by PatentIndex Score
46 records- 0195US10845700B2Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint moldCANON KK·Filed 2017·Granted Nov 24, 2020·5 cites·18 claims
- 0295US10754245B2Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint moldCANON KK·Filed 2017·Granted Aug 25, 2020·5 cites·20 claims
- 0392US10883006B2Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint moldCANON KK·Filed 2017·Granted Jan 5, 2021·5 cites·21 claims
- 0492US6317479B1X-ray mask, and exposure method and apparatus using the sameCANON KK·Filed 1997·Granted Nov 13, 2001·75 cites·21 claims
- 0590US10935884B2Pattern forming method and methods for manufacturing processed substrate, optical component and quartz mold replica as well as coating material for imprint pretreatment and set thereof with imprint resistCANON KK·Filed 2019·Granted Mar 2, 2021·6 cites·17 claims
- 0690US5553110AX-ray mask structure, process for production thereof, apparatus and method for X-ray exposure with the X-ray mask structure, and semiconductor device produced by the X-ray exposure methodCANON KK·Filed 1994·Granted Sep 3, 1996·63 cites·15 claims
- 0786US6728332B2X-ray mask, and exposure method and apparatus using the sameCANON KK·Filed 2001·Granted Apr 27, 2004·20 cites·24 claims
- 0886US2025083182A1Planarization method and photocurable compositionCANON KK·Filed 2024·Application pending·0 cites
- 0983US12179231B2Planarization method and photocurable compositionCANON KK·Filed 2023·Granted Dec 31, 2024·0 cites·9 claims
- 1083US4735877ALithographic mask structure and lithographic processCANON KK·Filed 1986·Granted Apr 5, 1988·41 cites·56 claims
- 1182US10293543B2Method of producing a patterned filmCANON KK·Filed 2014·Granted May 21, 2019·5 cites·6 claims
- 1281US6101237AX-ray mask and X-ray exposure method using the sameCANON KK·Filed 1997·Granted Aug 8, 2000·45 cites·10 claims
- 1378US11752519B2Planarization method and photocurable compositionCANON KK·Filed 2021·Granted Sep 12, 2023·0 cites·20 claims
- 1476US9957340B2Imprinting method and curable composition for imprintingCANON KK·Filed 2013·Granted May 1, 2018·2 cites·11 claims
- 1573US6449332B1Exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Sep 10, 2002·12 cites·25 claims
- 1672US6723475B2Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a deviceCANON KK·Filed 2001·Granted Apr 20, 2004·14 cites·35 claims
- 1771US5422921AX-ray mask structure and manufacturing methods including forming a metal oxide film on a portion of an X-ray permeable film having no X-ray absorber thereonCANON KK·Filed 1992·Granted Jun 6, 1995·22 cites·65 claims
- 1870US6455203B1Mask structure and method of manufacturing the sameCANON KK·Filed 2000·Granted Sep 24, 2002·10 cites·14 claims
- 1969US12436456B2Molding apparatus, molding method, and templateCANON KK·Filed 2021·Granted Oct 7, 2025·0 cites·11 claims
- 2069US6337161B2Mask structure exposure methodCANON KK·Filed 1998·Granted Jan 8, 2002·26 cites·11 claims
- 2166US10856422B2Method of forming pattern on a substrateCANON KK·Filed 2016·Granted Dec 1, 2020·1 cites·12 claims
- 2264US7072438B2Reflection type maskCANON KK·Filed 2003·Granted Jul 4, 2006·5 cites·9 claims
- 2362US6627468B2Method for manufacturing optical element, optical element, optical system using optical element, optical apparatus and exposure apparatus using optical system, and method for manufacturing deviceCANON KK·Filed 2001·Granted Sep 30, 2003·5 cites·34 claims
- 2460US7027227B2Three-dimensional structure forming methodCANON KK·Filed 2004·Granted Apr 11, 2006·6 cites·16 claims
- 2558US2022317566A1Molding apparatus, method of molding, and method of planarizationCANON KK·Filed 2022·Application pending·0 cites
- 2656US5952149AResist solution for photolithography including a base resin and an oxygen-free or low-oxygen solventCANON KK·Filed 1996·Granted Sep 14, 1999·13 cites·5 claims
- 2755US5846676AMask structure and exposure method and apparatus using the sameCANON KK·Filed 1996·Granted Dec 8, 1998·15 cites·10 claims
- 2850US10456974B2Photocurable composition, methods for producing film, optical component, circuit board, and electronic component by using the same, and cured productCANON KK·Filed 2014·Granted Oct 29, 2019·0 cites·5 claims
- 2949US6272202B1Exposure method and X-ray mask structure for use with the sameCANON KK·Filed 1999·Granted Aug 7, 2001·14 cites·17 claims
- 3047US7916273B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Mar 29, 2011·0 cites·7 claims
- 3147US6645707B2Device manufacturing methodCANON KK·Filed 2000·Granted Nov 11, 2003·1 cites·11 claims
- 3247US2009225290A1Exposure apparatus and device fabrication methodCANON KK·Filed 2009·Application pending·0 cites
- 3346US6829091B2Optical system and optical instrument with diffractive optical elementCANON KK·Filed 1999·Granted Dec 7, 2004·11 cites·11 claims
- 3446US6605392B2X-ray mask structure, and X-ray exposure method and apparatus using the sameCANON KK·Filed 1999·Granted Aug 12, 2003·9 cites·20 claims
- 3545US5882826AMembrane and mask, and exposure apparatus using the mask, and device producing method using the maskCANON KK·Filed 1996·Granted Mar 16, 1999·8 cites·11 claims
- 3645US2007177119A1Exposure apparatus and device manufacturing methodCHIBA KEIKO·Filed 2007·Application pending·0 cites
- 3744US5870448AX-ray mask and fabrication process using itCANON KK·Filed 1997·Granted Feb 9, 1999·8 cites·6 claims
- 3844US5770335AMask and exposure apparatus using the sameCANON KK·Filed 1996·Granted Jun 23, 1998·8 cites·11 claims
- 3944US5733688ALithographic mask structure and method of producing the same comprising W and molybdenum alloy absorberCANON KK·Filed 1995·Granted Mar 31, 1998·10 cites·10 claims
- 4043US2016158998A1Imprint apparatus and method, and method of manufacturing articleCANON KK·Filed 2015·Application pending·0 cites
- 4139US5656398AMethod of making X-ray mask structureCANON KK·Filed 1995·Granted Aug 12, 1997·5 cites·30 claims
- 4237US2012257180A1Method of cleaning pipe of immersion exposure apparatus, and method of manufacturing deviceTANABE MASAYUKI·Filed 2012·Application pending·0 cites
- 4336US6087076AMethod of manufacturing semiconductor devices by performing coating, heating, exposing and developing in a low-oxygen or oxygen free controlled environmentCANON KK·Filed 1997·Granted Jul 11, 2000·3 cites·7 claims
- 4435US5589304APhotomask comprising a holding frame and reinforcing member with a ceramic oxide bondCANON KK·Filed 1995·Granted Dec 31, 1996·3 cites·8 claims
- 4532US6418187B1X-ray mask structure, and X-ray exposure method and apparatus using the sameCANON KK·Filed 1999·Granted Jul 9, 2002·1 cites·36 claims
- 4631US4764528A2,4-pentadienoic acid derivatives and platelet aggregation inhibitors containing the sameTERUMO CORP·Filed 1987·Granted Aug 16, 1988·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →