Method of producing a patterned film

Abstract

In an imprint method in a condensable gas atmosphere, the force (mold releasing force) required to separate a mold from a resist cured film (mold release) has been large. A photocurable composition for performing imprint in an atmosphere containing a condensable gas includes a component (A) which is a (meth)acrylate monomer; a component (B) which is a photopolymerization initiator; and a component (C) which is a mold releasing agent. The saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 50% by weight or more, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm.

The invention claimed is: 
     
       1. A method for producing a patterned film, the method comprising:
 a step of placing a photocurable composition on a substrate; 
 a step of bringing the photocurable composition into contact with a mold in an atmosphere containing a condensable gas, the mold having an original pattern for transferring a pattern shape; 
 a step of irradiating the photocurable composition with light to form a cured film; and 
 a step of separating the cured film from the mold, 
 wherein the photocurable composition comprises:
 a component (A) which is a (meth)acrylate monomer; 
 a component (B) which is a photopolymerization initiator; and 
 a component (C) which is a mold releasing agent, 
 wherein a saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 50% by weight or more, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm, and 
 the condensable gas is a gas that becomes condensed and liquefies by a pressure of capillary action applied to the condensable gas by the photocurable composition during the step of bringing the photocurable composition into contact with the mold. 
 
 
     
     
       2. The method according to  claim 1 , wherein the atmosphere is a mixed gas atmosphere containing the condensable gas and a non-condensable gas. 
     
     
       3. The method according to  claim 2 , wherein the non-condensable gas is helium. 
     
     
       4. The method according to  claim 1 , wherein the condensable gas is one selected from chlorofluorocarbon, fluorocarbon, hydrochlorofluorocarbon, hydrofluorocarbon, and hydrofluoroether. 
     
     
       5. The method according to  claim 1 , wherein the condensable gas is 1,1,1,3,3-pentafluoropropane. 
     
     
       6. A method for producing an optical component, the method comprising a step of obtaining a patterned film on a substrate by the method according to  claim 1 .