Inventor · disambiguated record
Kenneth C. Dodge
Also filed as: DODGE KENNETH C
2 granted patents·5 citations·filing 2005–2010
47Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0177US7806126B1Substrate proximity drying using in-situ local heating of substrate and substrate carrier point of contact, and methods, apparatus, and systems for implementing the sameLAM RES CORP·Filed 2005·Granted Oct 5, 2010·5 cites·19 claims
- 0248US8011116B2Substrate proximity drying using in-situ local heating of substrateLAM RES CORP·Filed 2010·Granted Sep 6, 2011·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →