Inventor · disambiguated record
Kenneth Alan Goldberg
Also filed as: GOLDBERG KENNETH A · GOLDBERG KENNETH ALAN
13 granted patents·1 pending application·554 citations·filing 1998–2015
94Inventor score
Top patents by PatentIndex Score
14 records- 0195US6573997B1Hybrid shearing and phase-shifting point diffraction interferometerCALIFORNIA·Filed 2000·Granted Jun 3, 2003·106 cites·20 claims
- 0295US6233056B1Interferometric at-wavelength flare characterization of EUV optical systemsUNIV CALIFORNIA·Filed 2000·Granted May 15, 2001·70 cites·33 claims
- 0389US6118535AIn Situ alignment system for phase-shifting point-diffraction interferometryFiled 1999·Granted Sep 12, 2000·78 cites·36 claims
- 0487US6307635B1Phase-shifting point diffraction interferometer mask designsUNIV CALIFORNIA·Filed 1998·Granted Oct 23, 2001·68 cites·26 claims
- 0586US6100978ADual-domain point diffraction interferometerFiled 1999·Granted Aug 8, 2000·56 cites·35 claims
- 0681US6111646ANull test fourier domain alignment technique for phase-shifting point diffraction interferometerFiled 1999·Granted Aug 29, 2000·48 cites·41 claims
- 0776US6239878B1Fourier-transform and global contrast interferometer alignment methodsUNIV CALIFORNIA·Filed 1999·Granted May 29, 2001·37 cites·10 claims
- 0872US6707560B1Dual-domain lateral shearing interferometerUNIV CALIFORNIA·Filed 2000·Granted Mar 16, 2004·12 cites·24 claims
- 0970US6963395B2Method and apparatus for inspecting an EUV mask blankUNIV CALIFORNIA·Filed 2001·Granted Nov 8, 2005·10 cites·23 claims
- 1065US6341183B1Graphical user interface for image acquisition and processingUNIV CALIFORNIA·Filed 1998·Granted Jan 22, 2002·47 cites·13 claims
- 1163US8569678B2Micron-scale lens array having diffracting structuresGOLDBERG KENNETH A·Filed 2009·Granted Oct 29, 2013·4 cites·14 claims
- 1263US7027226B2Diffractive optical element for extreme ultraviolet wavefront controlEUV LLC·Filed 2001·Granted Apr 11, 2006·7 cites·19 claims
- 1341US6195169B1Phase-shifting point diffraction interferometer grating designsUNIV CALIFORNIA·Filed 1998·Granted Feb 27, 2001·11 cites·8 claims
- 1427US2015185486A1Holographic imaging element operable to generate multiple different images of an objectUNIV CALIFORNIA·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →