Inventor · disambiguated record
Kevin Li Gu
Also filed as: GU KEVIN · GU KEVIN LI
2 granted patents·11 pending applications·10 citations·filing 2019–2025
55Inventor score
Files withLAM RES CORP13
Top patents by PatentIndex Score
13 records- 0191US12211691B2Dry development of resistsLAM RES CORP·Filed 2019·Granted Jan 28, 2025·8 cites·12 claims
- 0288US12436464B2Pre-exposure photoresist curing to enhance EUV lithographic performanceLAM RES CORP·Filed 2021·Granted Oct 7, 2025·2 cites·25 claims
- 0372US2025112045A1Dry development of resistsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0469US2025291253A1Apparatus for photoresist dry depositionLAM RES CORP·Filed 2025·Application pending·0 cites
- 0569US2025244672A1Bake strategies to enhance lithographic performance of metal-containing resistLAM RES CORP·Filed 2025·Application pending·0 cites
- 0667US2025271766A1Metal chelators for development of metal-containing photoresistLAM RES CORP·Filed 2025·Application pending·0 cites
- 0756US2022308462A1Apparatus for photoresist dry depositionLAM RES CORP·Filed 2020·Application pending·0 cites
- 0855US2023266670A1Metal chelators for development of metal-containing photoresistLAM RES CORP·Filed 2021·Application pending·0 cites
- 0952US2023314946A1Method of forming photo-sensitive hybrid filmsLAM RES CORP·Filed 2021·Application pending·0 cites
- 1052US2025053092A1Aqueous acid development or treatment of organometallic photoresistLAM RES CORP·Filed 2022·Application pending·0 cites
- 1147US2022365434A1Substrate surface modification with high euv absorbers for high performance euv photoresistsLAM RES CORP·Filed 2020·Application pending·0 cites
- 1244US2022344136A1Dry chamber clean of photoresist filmsLAM RES CORP·Filed 2020·Application pending·0 cites
- 1344US2022299877A1Positive tone development of cvd euv resist filmsLAM RES CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →