Inventor · disambiguated record
Keith Harvey
Also filed as: HARVEY KEITH · HARVEY KEITH R
4 granted patents·1,240 citations·filing 1997–2003
85Inventor score
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
4 records- 0197US6566278B1Method for densification of CVD carbon-doped silicon oxide films through UV irradiationAPPLIED MATERIALS INC·Filed 2000·Granted May 20, 2003·647 cites·9 claims
- 0295US6614181B1UV radiation source for densification of CVD carbon-doped silicon oxide filmsAPPLIED MATERIALS INC·Filed 2000·Granted Sep 2, 2003·114 cites·6 claims
- 0395US5904170APressure flow and concentration control of oxygen/ozone gas mixturesAPPLIED MATERIALS INC·Filed 1997·Granted May 18, 1999·456 cites·1 claims
- 0483US7037376B2Backflush chamber cleanAPPLIED MATERIALS INC·Filed 2003·Granted May 2, 2006·23 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →