Inventor · disambiguated record
Kenichi Kagami
Also filed as: KAGAMI KENICHI
7 granted patents·4 pending applications·2,112 citations·filing 2002–2007
91Inventor score
Top patents by PatentIndex Score
11 records- 0198US7789965B2Method of cleaning UV irradiation chamberASM JAPAN·Filed 2007·Granted Sep 7, 2010·527 cites·7 claims
- 0298US7763869B2UV light irradiating apparatus with liquid filterASM JAPAN·Filed 2007·Granted Jul 27, 2010·507 cites·14 claims
- 0398US7582575B2Method for forming insulation filmASM JAPAN·Filed 2005·Granted Sep 1, 2009·467 cites·18 claims
- 0498US7501292B2Method for managing UV irradiation for curing semiconductor substrateASM JAPAN·Filed 2007·Granted Mar 10, 2009·525 cites·17 claims
- 0590US6767836B2Method of cleaning a CVD reaction chamber using an active oxygen speciesASM JAPAN·Filed 2002·Granted Jul 27, 2004·69 cites·1 claims
- 0666US7274354B2Portable electronic apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Sep 25, 2007·12 cites·9 claims
- 0757US7229935B2Method of forming a thin film by plasma CVD of a silicon-containing source gasASM JAPAN·Filed 2004·Granted Jun 12, 2007·5 cites·26 claims
- 0846US2003124991A1Mobile terminal deviceFiled 2002·Application pending·0 cites
- 0945US2009093134A1Semiconductor manufacturing apparatus and method for curing materials with uv lightASM JAPAN·Filed 2007·Application pending·0 cites
- 1045US2009093135A1Semiconductor manufacturing apparatus and method for curing material with uv lightASM JAPAN·Filed 2007·Application pending·0 cites
- 1138US2005178333A1System and method of CVD chamber cleaningASM JAPAN·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →