Inventor · disambiguated record
Keita Kambara
Also filed as: KAMBARA KEITA
1 granted patent·4 pending applications·1 citations·filing 2015–2019
16Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0158US9773647B2Plasma processing apparatus and upper electrode assemblyTOKYO ELECTRON LTD·Filed 2015·Granted Sep 26, 2017·1 cites·9 claims
- 0252US2020035464A1Cooling structure and parallel plate etching apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0343US2016203955A1Cooling structure and parallel plate etching apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0430US2016042926A1Plasma processing apparatus and focus ringTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0530US2017069470A1Upper electrode structure of plasma processing apparatus, plasma processing apparatus, and operation method thereforTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →