Inventor · disambiguated record
Kengo Kaneko
Also filed as: KANEKO KENGO
7 granted patents·16 citations·filing 2004–2021
78Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0184US11011347B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted May 18, 2021·3 cites·12 claims
- 0282US10923369B2Temperature controlling apparatus, temperature controlling method, and placing tableTOKYO ELECTRON LTD·Filed 2017·Granted Feb 16, 2021·3 cites·16 claims
- 0368US11735392B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Aug 22, 2023·0 cites·11 claims
- 0467US7870751B2Temperature control system and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jan 18, 2011·3 cites·9 claims
- 0561US11837480B2Temperature controlling apparatus, temperature controlling method, and placing tableTOKYO ELECTRON LTD·Filed 2021·Granted Dec 5, 2023·0 cites·21 claims
- 0652US7510884B2Semiconductor production system and semiconductor production processTOKYO ELECTRON LTD·Filed 2004·Granted Mar 31, 2009·7 cites·18 claims
- 0739US10361089B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Jul 23, 2019·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →