Inventor · disambiguated record
Kerem Kapkin
Also filed as: KAPKIN KEREM
1 granted patent·2 pending applications·102 citations·filing 2000–2003
53Inventor score
Files withSILICON VALLEY GROUP THERMAL1
Top patents by PatentIndex Score
3 records- 0187US6387764B1Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growthSILICON VALLEY GROUP THERMAL·Filed 2000·Granted May 14, 2002·102 cites·17 claims
- 0234US2005175789A1Method for energy-assisted atomic layer deposition and removalFiled 2003·Application pending·0 cites
- 0332US2002127883A1Bis (tertiarybutylamino) silane and ozone based doped and undoped oxidesFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →