Inventor · disambiguated record
Keith J. Machia
Also filed as: MACHIA KEITH J
5 granted patents·29 citations·filing 2002–2014
77Inventor score
Top patents by PatentIndex Score
5 records- 0187US9570564B2Self-aligned emitter-base bipolar junction transistor with reduced base resistance and base-collector capacitanceGLOBALFOUNDRIES INC·Filed 2014·Granted Feb 14, 2017·8 cites·18 claims
- 0267US6944578B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2004·Granted Sep 13, 2005·9 cites·6 claims
- 0365US6917901B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2002·Granted Jul 12, 2005·8 cites·26 claims
- 0455US6674516B2Method of photolithographic exposure dose control as a function of resist sensitivityIBM·Filed 2002·Granted Jan 6, 2004·4 cites·7 claims
- 0540US6856378B2Method of photolithographic exposure dose control as a function of resist sensitivityIBM·Filed 2003·Granted Feb 15, 2005·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →