Inventor · disambiguated record
Kennan Mo
Also filed as: MO KENNAN
2 granted patents·1 pending application·0 citations·filing 2018–2019
21Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0140US11753719B2Flow rate control method, flow rate control device, and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 12, 2023·0 cites·8 claims
- 0236US2019078207A1Gas supply apparatus and film forming apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0332US11236425B2Method of processing substrateTOKYO ELECTRON LTD·Filed 2018·Granted Feb 1, 2022·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →