Inventor · disambiguated record
Kevin P. Monahan
Also filed as: MONAHAN KEVIN · MONAHAN KEVIN P
4 granted patents·74 citations·filing 2005–2022
75Inventor score
Top patents by PatentIndex Score
4 records- 0196US7557921B1Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic toolsKLA TENCOR TECH CORP·Filed 2005·Granted Jul 7, 2009·55 cites·14 claims
- 0286US11544419B1Subsampling method for converting 3D scan data of an object for marine, civil, and architectural works into smaller densities for processing without CAD processingPOINTLAB INC·Filed 2022·Granted Jan 3, 2023·7 cites·20 claims
- 0382US7678516B2Test structures and methods for monitoring or controlling a semiconductor fabrication processKLA TENCOR TECH CORP·Filed 2005·Granted Mar 16, 2010·12 cites·27 claims
- 0460US12019956B2Subsampling method for converting 3D scan data of an object for marine, civil, and architectural works into smaller densities for processing without CAD processingPOINTLAB INC·Filed 2022·Granted Jun 25, 2024·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →