Inventor · disambiguated record
Kenji Nishi
Also filed as: NISHI KENJI
147 granted patents·17 pending applications·12,167 citations·filing 1985–2022
99Inventor score
Top patents by PatentIndex Score
164 records- 0199US6608681B2Exposure method and apparatusNIKON CORP·Filed 2002·Granted Aug 19, 2003·171 cites·19 claims
- 0299US6590634B1Exposure apparatus and methodNIKON CORP·Filed 2000·Granted Jul 8, 2003·843 cites·50 claims
- 0399US6549269B1Exposure apparatus and an exposure methodNIKON CORP·Filed 2000·Granted Apr 15, 2003·601 cites·56 claims
- 0499US6400441B1Projection exposure apparatus and methodNIKON CORP·Filed 2000·Granted Jun 4, 2002·707 cites·36 claims
- 0599US6341007B1Exposure apparatus and methodNIKON CORP·Filed 2000·Granted Jan 22, 2002·1k cites·25 claims
- 0699US5646413AExposure apparatus and method which synchronously moves the mask and the substrate to measure displacementNIKON CORP·Filed 1996·Granted Jul 8, 1997·504 cites·34 claims
- 0799US5493403AMethod and apparatus for the alignment of a substrateNIKON CORP·Filed 1995·Granted Feb 20, 1996·285 cites·15 claims
- 0899US5448332AExposure method and apparatusNIKON CORP·Filed 1994·Granted Sep 5, 1995·705 cites·38 claims
- 0999US5243195AProjection exposure apparatus having an off-axis alignment system and method of alignment thereforNIKON CORP·Filed 1992·Granted Sep 7, 1993·821 cites·11 claims
- 1099US5194893AExposure method and projection exposure apparatusNIKON CORP·Filed 1992·Granted Mar 16, 1993·302 cites·5 claims
- 1198US7256869B2Exposure apparatus and an exposure methodNIKON CORP·Filed 2006·Granted Aug 14, 2007·103 cites·40 claims
- 1298US7177008B2Exposure apparatus and methodNIKON CORP·Filed 2004·Granted Feb 13, 2007·135 cites·15 claims
- 1398US6498352B1Method of exposing and apparatus thereforNIKON CORP·Filed 2001·Granted Dec 24, 2002·92 cites·18 claims
- 1498US6331885B1Stage apparatus, scanning type exposure apparatus, and device produced with the sameNIKON CORP·Filed 2000·Granted Dec 18, 2001·164 cites·46 claims
- 1598US6279881B1Method and apparatus which exposes a second object with a pattern formed on a first object and which performs statistical calculation based on position information of marks on the first objectNIKON CORP·Filed 2000·Granted Aug 28, 2001·90 cites·23 claims
- 1698US5477304AProjection exposure apparatusNIKON CORP·Filed 1995·Granted Dec 19, 1995·227 cites·34 claims
- 1798US5473410AProjection exposure apparatusNIKON CORP·Filed 1994·Granted Dec 5, 1995·200 cites·19 claims
- 1897US6798491B2Exposure apparatus and an exposure methodNIKON CORP·Filed 2001·Granted Sep 28, 2004·103 cites·26 claims
- 1997US6590636B2Projection exposure method and apparatusNIKON CORP·Filed 2001·Granted Jul 8, 2003·78 cites·26 claims
- 2097US6522386B1Exposure apparatus having projection optical system with aberration correction elementNIKON CORP·Filed 2000·Granted Feb 18, 2003·93 cites·13 claims
- 2197US6051843AExposure apparatus and method which synchronously moves the mask and the substrate to measure displacementNIKON CORP·Filed 1998·Granted Apr 18, 2000·124 cites·22 claims
- 2297US5591958AScanning exposure method and apparatusNIKON CORP·Filed 1996·Granted Jan 7, 1997·194 cites·22 claims
- 2397US4962318AAlignment system for exposure apparatusNIKON CORP·Filed 1989·Granted Oct 9, 1990·119 cites·4 claims
- 2496US6906782B2Stage apparatus, scanning type exposure apparatus, and device produced with the sameNIKON CORP·Filed 2003·Granted Jun 14, 2005·79 cites·44 claims
- 2596US6597430B1Exposure method, illuminating device, and exposure systemNIKON CORP·Filed 2000·Granted Jul 22, 2003·92 cites·38 claims
- 2696US6400445B2Method and apparatus for positioning substrateNIKON CORP·Filed 2001·Granted Jun 4, 2002·87 cites·14 claims
- 2796US5693439AExposure method and apparatusNIKON CORP·Filed 1995·Granted Dec 2, 1997·117 cites·25 claims
- 2895US6853443B2Exposure apparatus, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2002·Granted Feb 8, 2005·98 cites·10 claims
- 2995US6545746B1Projection exposure apparatusNIKON CORP·Filed 2000·Granted Apr 8, 2003·59 cites·21 claims
- 3095US6433872B1Exposure method and apparatusNIKON CORP·Filed 1999·Granted Aug 13, 2002·99 cites·42 claims
- 3195US5883704AProjection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical systemNIKON CORP·Filed 1996·Granted Mar 16, 1999·183 cites·46 claims
- 3295US5844247AExposure apparatus and method which synchronously moves the mask and the substrate to measure displacementNIKON CORP·Filed 1997·Granted Dec 1, 1998·99 cites·119 claims
- 3394US6813000B1Exposure method and apparatusNIKON CORP·Filed 2000·Granted Nov 2, 2004·60 cites·53 claims
- 3494US6563565B2Apparatus and method for projection exposureNIKON CORP·Filed 2001·Granted May 13, 2003·56 cites·47 claims
- 3594US6225012B1Method for positioning substrateNIKON CORP·Filed 2000·Granted May 1, 2001·57 cites·32 claims
- 3694US4952815AFocusing device for projection exposure apparatusNIKON CORP·Filed 1989·Granted Aug 28, 1990·74 cites·10 claims
- 3793US7738179B2Image display device using P-polarized light and S-polarized lightNISHI KENJI·Filed 2004·Granted Jun 15, 2010·63 cites·10 claims
- 3893US6335787B1Projection exposure apparatusNIKON CORP·Filed 2001·Granted Jan 1, 2002·54 cites·21 claims
- 3993US5739899AProjection exposure apparatus correcting tilt of telecentricityNIKON CORP·Filed 1996·Granted Apr 14, 1998·92 cites·29 claims
- 4093US5272501AProjection exposure apparatusNIKON CORP·Filed 1992·Granted Dec 21, 1993·89 cites·23 claims
- 4192USRE36730EProjection exposure apparatus having an off-axis alignment system and method of alignment thereforNIPPON KOGAKU KK·Filed 1998·Granted Jun 13, 2000·81 cites·13 claims
- 4292US5854671AScanning exposure method and apparatus therefor and a projection exposure apparatus and method which selectively chooses between static exposure and scanning exposureNIKON CORP·Filed 1997·Granted Dec 29, 1998·72 cites·38 claims
- 4391US6765647B1Exposure method and deviceNIKON CORP·Filed 1999·Granted Jul 20, 2004·72 cites·30 claims
- 4491US6462807B1Projection exposure apparatus and methodNIKON CORP·Filed 2000·Granted Oct 8, 2002·29 cites·28 claims
- 4591US6198527B1Projection exposure apparatus and exposure methodNIKON CORP·Filed 1998·Granted Mar 6, 2001·36 cites·34 claims
- 4690US7068444B2Image display unit and projection optical systemNISHI KENJI·Filed 2003·Granted Jun 27, 2006·47 cites·6 claims
- 4790US6590633B1Stage apparatus and method for producing circuit device utilizing the sameNIKON CORP·Filed 1998·Granted Jul 8, 2003·99 cites·67 claims
- 4890US6577382B2Substrate transport apparatus and methodNIKON CORP·Filed 2002·Granted Jun 10, 2003·55 cites·4 claims
- 4990US6327022B1Projection exposure method and apparatusNIKON CORP·Filed 1999·Granted Dec 4, 2001·67 cites·61 claims
- 5090US5892572AProjection exposure apparatus and methodNIKON CORP·Filed 1998·Granted Apr 6, 1999·77 cites·85 claims
Showing the top 50 of 164 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →