Inventor · disambiguated record
Kenji Obara
Also filed as: OBARA KENJI
50 granted patents·7 pending applications·456 citations·filing 1999–2020
98Inventor score
Top patents by PatentIndex Score
57 records- 0196US7485858B1Inspection method for semiconductor wafer and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 3, 2009·23 cites·3 claims
- 0291US7113628B1Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatusHITACHI LTD·Filed 2000·Granted Sep 26, 2006·54 cites·3 claims
- 0389US6476388B1Scanning electron microscope having magnification switching controlHITACHI LTD·Filed 1999·Granted Nov 5, 2002·95 cites·9 claims
- 0487US8309919B2Inspection method for semiconductor wafer and apparatus for reviewing defectsOBARA KENJI·Filed 2009·Granted Nov 13, 2012·10 cites·3 claims
- 0586US7932493B2Method and system for observing a specimen using a scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Apr 26, 2011·11 cites·14 claims
- 0685US7732765B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Jun 8, 2010·7 cites·19 claims
- 0781US8355559B2Method and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2009·Granted Jan 15, 2013·9 cites·16 claims
- 0880US6792366B2Method and apparatus for inspecting defects in a semiconductor waferHITACHI LTD·Filed 2001·Granted Sep 14, 2004·21 cites·10 claims
- 0978US8121397B2Method and its apparatus for reviewing defectsHARADA MINORU·Filed 2009·Granted Feb 21, 2012·9 cites·12 claims
- 1078US6553323B1Method and its apparatus for inspecting a specimenHITACHI LTD·Filed 2000·Granted Apr 22, 2003·21 cites·24 claims
- 1177US6792367B2Method and apparatus for inspecting defects in a semiconductor waferHITACHI LTD·Filed 2002·Granted Sep 14, 2004·18 cites·2 claims
- 1277US6741941B2Method and apparatus for analyzing defect informationHITACHI LTD·Filed 2003·Granted May 25, 2004·19 cites·28 claims
- 1376US9280814B2Charged particle beam apparatus that performs image classification assistanceHIRAI TAKEHIRO·Filed 2012·Granted Mar 8, 2016·4 cites·9 claims
- 1476US9177757B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Nov 3, 2015·3 cites·6 claims
- 1575US9335277B2Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination methodNAKAGAKI RYO·Filed 2012·Granted May 10, 2016·3 cites·15 claims
- 1675US7881558B2Scanning microscopeHITACHI HIGH TECH CORP·Filed 2009·Granted Feb 1, 2011·3 cites·9 claims
- 1775US7584012B2Automatic defect review and classification systemHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 1, 2009·5 cites·2 claims
- 1873US7593564B2Method and apparatus for reviewing defect of subject to be inspectedHITACHI HIGH TECH CORP·Filed 2005·Granted Sep 22, 2009·3 cites·4 claims
- 1973US7361896B2Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 22, 2008·3 cites·26 claims
- 2073US6870169B2Method and apparatus for analyzing composition of defectsHITACHI LTD·Filed 2003·Granted Mar 22, 2005·18 cites·23 claims
- 2172US8428336B2Inspecting method, inspecting system, and method for manufacturing electronic devicesIKEDA YOKO·Filed 2006·Granted Apr 23, 2013·7 cites·13 claims
- 2271US7526143B2Imaging methodHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 28, 2009·2 cites·9 claims
- 2368US8467595B2Defect review system and method, and programTAKAHASHI NORITSUGU·Filed 2009·Granted Jun 18, 2013·4 cites·5 claims
- 2466US9685301B2Charged-particle radiation apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Jun 20, 2017·1 cites·17 claims
- 2566US8013299B2Review method and review deviceHITACHI HIGH TECH CORP·Filed 2009·Granted Sep 6, 2011·1 cites·6 claims
- 2665US8121393B2Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis programSATOU NORIO·Filed 2009·Granted Feb 21, 2012·4 cites·9 claims
- 2765US8108172B2Defect review apparatus and method of reviewing defectsHIRAI TAKEHIRO·Filed 2010·Granted Jan 31, 2012·1 cites·9 claims
- 2865US7664562B2Automatic defect review and classification systemHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 16, 2010·2 cites·11 claims
- 2965US7638767B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Dec 29, 2009·3 cites·17 claims
- 3065US7105815B2Method and apparatus for collecting defect imagesHITACHI HIGH TECH CORP·Filed 2004·Granted Sep 12, 2006·6 cites·9 claims
- 3164US9582875B2Defect analysis assistance device, program executed by defect analysis assistance device, and defect analysis systemHITACHI HIGH TECH CORP·Filed 2013·Granted Feb 28, 2017·1 cites·12 claims
- 3264US9312099B2Charged particle beam device and method for analyzing defect thereinHITACHI HIGH TECH CORP·Filed 2013·Granted Apr 12, 2016·1 cites·11 claims
- 3364US8779360B2Charged particle beam device, defect observation device, and management serverMIYAKE KOZO·Filed 2011·Granted Jul 15, 2014·2 cites·12 claims
- 3463US7925367B2Defect review and classification systemHITACHI HIGH TECH CORP·Filed 2009·Granted Apr 12, 2011·0 cites·4 claims
- 3563US7866746B2Structure of attaching monitor panelTOYOTA BOSHOKU KK·Filed 2008·Granted Jan 11, 2011·9 cites·13 claims
- 3662US8731275B2Method and apparatus for reviewing defectsHARADA MINORU·Filed 2012·Granted May 20, 2014·1 cites·5 claims
- 3762US8139847B2Defect inspection tool and method of parameter tuning for defect inspection toolYAMAGUCHI KOHEI·Filed 2009·Granted Mar 20, 2012·3 cites·9 claims
- 3862US7068834B1Inspecting method, inspecting system, and method for manufacturing electronic devicesHITACHI LTD·Filed 1999·Granted Jun 27, 2006·35 cites·34 claims
- 3962US6756589B1Method for observing specimen and device thereforHITACHI LTD·Filed 1999·Granted Jun 29, 2004·29 cites·10 claims
- 4061US7869969B2Defect review apparatus and method of reviewing defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Jan 11, 2011·0 cites·12 claims
- 4160US7834651B2Power supply circuitADVANTEST CORP·Filed 2008·Granted Nov 16, 2010·3 cites·7 claims
- 4259US2013228685A1Inspection method for semiconductor wafer and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 4358US8280148B2Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis programSATOU NORIO·Filed 2012·Granted Oct 2, 2012·1 cites·9 claims
- 4458US2013112872A1Inspection method for semiconductor wafer and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2012·Application pending·0 cites
- 4557US8878925B2Observation method and observation deviceBAN NAOMA·Filed 2010·Granted Nov 4, 2014·1 cites·18 claims
- 4651US11195694B2Charged particle beam system, method for determining range for automatically searching for focal point position in charged particle beam device, and non-transitory storage medium recording program for causing computer system to determine range for automatically searching for focal position in charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Dec 7, 2021·0 cites·13 claims
- 4751US8188428B2Scanning electron microscopeYAMAGUCHI KOHEI·Filed 2010·Granted May 29, 2012·0 cites·7 claims
- 4849US8634634B2Defect observation method and defect observation apparatusHARADA MINORU·Filed 2009·Granted Jan 21, 2014·0 cites·10 claims
- 4949US2011261190A1Defect observation device and defect observation methodNAKAGAKI RYO·Filed 2009·Application pending·0 cites
- 5049US2008187212A1Defect Image Classifying Method and Apparatus and a Semiconductor Device Manufacturing Process Based on the Method and ApparatusHITACHI LTD·Filed 2008·Application pending·0 cites
Showing the top 50 of 57 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →