Inventor · disambiguated record
Keiji Onzuka
Also filed as: ONZUKA KEIJI
6 granted patents·1 pending application·4 citations·filing 2016–2024
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0192US11978644B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted May 7, 2024·2 cites·8 claims
- 0281US12183613B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Dec 31, 2024·1 cites·19 claims
- 0373US2025087515A1Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0465US11469114B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Oct 11, 2022·0 cites·9 claims
- 0563US10770283B2Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing systemTOKYO ELECTRON LTD·Filed 2016·Granted Sep 8, 2020·1 cites·5 claims
- 0655US11626277B2Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing systemTOKYO ELECTRON LTD·Filed 2020·Granted Apr 11, 2023·0 cites·4 claims
- 0733US10818532B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Oct 27, 2020·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →