Inventor · disambiguated record
Keigo Satake
Also filed as: SATAKE KEIGO
12 granted patents·1 pending application·31 citations·filing 2003–2023
83Inventor score
Top patents by PatentIndex Score
13 records- 0181US7086410B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2003·Granted Aug 8, 2006·27 cites·27 claims
- 0278US10591935B2Substrate liquid processing apparatus and substrate liquid processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Mar 17, 2020·3 cites·7 claims
- 0374US12264396B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Apr 1, 2025·0 cites·6 claims
- 0466US11905603B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Feb 20, 2024·0 cites·9 claims
- 0556US10162371B2Substrate liquid processing apparatus and substrate liquid processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Dec 25, 2018·1 cites·9 claims
- 0646US11135698B2Processing apparatus, processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Oct 5, 2021·0 cites·13 claims
- 0744US8104948B2Processing liquid mixing apparatus and method, substrate processing apparatus, and storage mediumSATAKE KEIGO·Filed 2009·Granted Jan 31, 2012·0 cites·13 claims
- 0842US11043399B2Substrate processing apparatus and operation method of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 22, 2021·0 cites·19 claims
- 0942US8409359B2Substrate processing apparatus, substrate processing method and storage mediumSATAKE KEIGO·Filed 2008·Granted Apr 2, 2013·0 cites·9 claims
- 1038US2007181147A1Processing-fluid flow measuring methodSATAKE KEIGO·Filed 2006·Application pending·0 cites
- 1137US11353894B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Jun 7, 2022·0 cites·8 claims
- 1235US10261521B2Processing apparatus, processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Apr 16, 2019·0 cites·11 claims
- 1334US8622073B2Apparatus and method for controlling flow rate of liquid, and storage mediumSATAKE KEIGO·Filed 2011·Granted Jan 7, 2014·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →