Inventor · disambiguated record
Kevin R. Shea
Also filed as: SHEA KEVIN · SHEA KEVIN R
58 granted patents·11 pending applications·335 citations·filing 2003–2020
98Inventor score
Top patents by PatentIndex Score
69 records- 0198US7682924B2Methods of forming a plurality of capacitorsMICRON TECHNOLOGY INC·Filed 2007·Granted Mar 23, 2010·57 cites·40 claims
- 0297US7452770B2Reduced cell-to-cell shorting for memory arraysMICRON TECHNOLOGY INC·Filed 2005·Granted Nov 18, 2008·64 cites·23 claims
- 0392US7785962B2Methods of forming a plurality of capacitorsMICRON TECHNOLOGY INC·Filed 2007·Granted Aug 31, 2010·17 cites·40 claims
- 0492US7666797B2Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive materialMICRON TECHNOLOGY INC·Filed 2006·Granted Feb 23, 2010·14 cites·19 claims
- 0588US7935602B2Semiconductor processing methodsMICRON TECHNOLOGY INC·Filed 2005·Granted May 3, 2011·15 cites·14 claims
- 0686US11355348B2Integrated circuit, construction of integrated circuitry, and method of forming an arrayMICRON TECHNOLOGY INC·Filed 2020·Granted Jun 7, 2022·2 cites·9 claims
- 0786US8268695B2Methods of making capacitorsKIEHLBAUCH MARK·Filed 2008·Granted Sep 18, 2012·11 cites·8 claims
- 0884US9076680B2Integrated circuitry, methods of forming capacitors, and methods of forming integrated circuitry comprising an array of capacitors and circuitry peripheral to the arrayBUSCH BRETT W·Filed 2011·Granted Jul 7, 2015·9 cites·40 claims
- 0984US8889559B2Methods of forming a pattern on a substrateMICRON TECHNOLOGY INC·Filed 2012·Granted Nov 18, 2014·6 cites·27 claims
- 1083US8076248B2Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive materialSHEA KEVIN R·Filed 2010·Granted Dec 13, 2011·4 cites·9 claims
- 1182US7618874B1Methods of forming capacitorsMICRON TECHNOLOGY INC·Filed 2008·Granted Nov 17, 2009·8 cites·29 claims
- 1281US7683021B2Methods of removing metal-containing materialsMICRON TECHNOLOGY INC·Filed 2006·Granted Mar 23, 2010·4 cites·18 claims
- 1381US7312120B2Method for obtaining extreme selectivity of metal nitrides and metal oxidesMICRON TECHNOLOGY INC·Filed 2004·Granted Dec 25, 2007·16 cites·22 claims
- 1481US7276455B2Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitorMICRON TECHNOLOGY INC·Filed 2006·Granted Oct 2, 2007·6 cites·26 claims
- 1578US8691704B2Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive materialMICRON TECHNOLOGY INC·Filed 2013·Granted Apr 8, 2014·2 cites·12 claims
- 1678US7442979B2Reduced cell-to-cell shorting for memory arraysMICRON TECHNOLOGY INC·Filed 2007·Granted Oct 28, 2008·5 cites·14 claims
- 1777US8440525B2Method for obtaining extreme selectivity of metal nitrides and metal oxidesSHEA KEVIN R·Filed 2012·Granted May 14, 2013·2 cites·9 claims
- 1877US7964471B2Methods of forming capacitorsMICRON TECHNOLOGY INC·Filed 2010·Granted Jun 21, 2011·3 cites·30 claims
- 1976US8470716B2Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive materialSHEA KEVIN R·Filed 2011·Granted Jun 25, 2013·2 cites·21 claims
- 2076US7667258B2Double-sided container capacitors using a sacrificial layerMICRON TECHNOLOGY INC·Filed 2007·Granted Feb 23, 2010·5 cites·17 claims
- 2176US7442319B2Poly etch without separate oxide decapMICRON TECHNOLOGY INC·Filed 2005·Granted Oct 28, 2008·6 cites·25 claims
- 2275US7824505B2Method to address carbon incorporation in an interpoly oxideMICRON TECHNOLOGY INC·Filed 2006·Granted Nov 2, 2010·4 cites·17 claims
- 2373US7683020B2Methods of removing metal-containing materialsMICRON TECHNOLOGY INC·Filed 2006·Granted Mar 23, 2010·2 cites·11 claims
- 2472US7696056B2Methods of forming capacitorsMICRON TECHNOLOGY INC·Filed 2008·Granted Apr 13, 2010·3 cites·30 claims
- 2569US7244682B2Methods of removing metal-containing materialsMICRON TECHNOLOGY INC·Filed 2004·Granted Jul 17, 2007·7 cites·16 claims
- 2666US8450164B2Methods of forming a plurality of capacitorsBHAT VISHWANATH·Filed 2010·Granted May 28, 2013·2 cites·26 claims
- 2765US8999852B2Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrateMICRON TECHNOLOGY INC·Filed 2012·Granted Apr 7, 2015·1 cites·37 claims
- 2865US7329576B2Double-sided container capacitors using a sacrificial layerMICRON TECHNOLOGY INC·Filed 2004·Granted Feb 12, 2008·9 cites·38 claims
- 2965US7214978B2Semiconductor fabrication that includes surface tension controlMICRON TECHNOLOGY INC·Filed 2004·Granted May 8, 2007·6 cites·44 claims
- 3064US7541635B2Semiconductor fabrication using a collarMICRON TECHNOLOGY INC·Filed 2006·Granted Jun 2, 2009·2 cites·19 claims
- 3164US7115527B2Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitorMICRON TECHNOLOGY INC·Filed 2004·Granted Oct 3, 2006·7 cites·70 claims
- 3263US8058126B2Semiconductor devices and structures including at least partially formed container capacitors and methods of forming the sameBUSCH BRETT·Filed 2009·Granted Nov 15, 2011·2 cites·16 claims
- 3363US7806988B2Method to address carbon incorporation in an interpoly oxideMICRON TECHNOLOGY INC·Filed 2004·Granted Oct 5, 2010·7 cites·28 claims
- 3462US8119537B2Selective etching of oxides to metal nitrides and metal oxidesSHEA KEVIN R·Filed 2005·Granted Feb 21, 2012·1 cites·10 claims
- 3562US7091085B2Reduced cell-to-cell shorting for memory arraysMICRON TECHNOLOGY INC·Filed 2003·Granted Aug 15, 2006·7 cites·50 claims
- 3661US7468323B2Method of forming high aspect ratio structuresMICRON TECHNOLOGY INC·Filed 2004·Granted Dec 23, 2008·6 cites·15 claims
- 3760US8846542B2Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive materialMICRON TECHNOLOGY INC·Filed 2014·Granted Sep 30, 2014·0 cites·10 claims
- 3860US2015031212A1Method for obtaining extreme selectivity of metal nitrides and metal oxidesMICRON TECHNOLOGY INC·Filed 2014·Application pending·0 cites
- 3959US7927500B2Poly etch without separate oxide decapMICRON TECHNOLOGY INC·Filed 2007·Granted Apr 19, 2011·1 cites·27 claims
- 4059US7109089B2Semiconductor fabrication using a collarMICRON TECHNOLOGY INC·Filed 2004·Granted Sep 19, 2006·7 cites·51 claims
- 4158US8883591B2Method for obtaining extreme selectivity of metal nitrides and metal oxidesMICRON TECHNOLOGY INC·Filed 2013·Granted Nov 11, 2014·0 cites·16 claims
- 4257US2008099817A1Method for obtaining extreme selectivity of metal nitrides and metal oxidesMICRON TECHNOLOGY INC·Filed 2007·Application pending·0 cites
- 4355US7683022B2Methods of removing metal-containing materialsMICRON TECHNOLOGY INC·Filed 2006·Granted Mar 23, 2010·0 cites·9 claims
- 4455US7368416B2Methods of removing metal-containing materialsMICRON TECHNOLOGY INC·Filed 2006·Granted May 6, 2008·0 cites·15 claims
- 4554US7642196B2Semiconductor fabrication processesMICRON TECHNOLOGY INC·Filed 2006·Granted Jan 5, 2010·0 cites·25 claims
- 4654US2007173013A1Semiconductor fabrication that includes surface tension controlMICRON TECHNOLOGY INC·Filed 2007·Application pending·0 cites
- 4753US8623725B2Methods of forming capacitorsKIEHLBAUCH MARK·Filed 2012·Granted Jan 7, 2014·0 cites·30 claims
- 4853US7465627B2Methods of forming capacitorsMICRON TECHNOLOGY INC·Filed 2006·Granted Dec 16, 2008·0 cites·25 claims
- 4952US8853050B2Methods of forming capacitorsKIEHLBAUCH MARK·Filed 2012·Granted Oct 7, 2014·0 cites·23 claims
- 5052US8318578B2Method of forming capacitorsSHEA KEVIN·Filed 2009·Granted Nov 27, 2012·1 cites·27 claims
Showing the top 50 of 69 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →