Assignee
KIEHLBAUCH MARK
US·12 granted patents·1 pending application·41 citations·filing 2007–2012
Top patents by PatentIndex Score
13 records- 0194US8088691B2Selective etch chemistries for forming high aspect ratio features and associated structuresKIEHLBAUCH MARK·Filed 2009·Granted Jan 3, 2012·23 cites·20 claims
- 0286US8268695B2Methods of making capacitorsKIEHLBAUCH MARK·Filed 2008·Granted Sep 18, 2012·11 cites·8 claims
- 0378US8388851B2Capacitor forming methodsKIEHLBAUCH MARK·Filed 2008·Granted Mar 5, 2013·5 cites·20 claims
- 0468US8721836B2Plasma processing with preionized and predissociated tuning gases and associated systems and methodsKIEHLBAUCH MARK·Filed 2008·Granted May 13, 2014·1 cites·9 claims
- 0563US8512582B2Methods of patterning a substrateKIEHLBAUCH MARK·Filed 2008·Granted Aug 20, 2013·1 cites·39 claims
- 0654US9153497B2Semiconductor constructionsKIEHLBAUCH MARK·Filed 2012·Granted Oct 6, 2015·0 cites·7 claims
- 0753US8623725B2Methods of forming capacitorsKIEHLBAUCH MARK·Filed 2012·Granted Jan 7, 2014·0 cites·30 claims
- 0853US8500913B2Methods for treating surfaces, and methods for removing one or more materials from surfacesKIEHLBAUCH MARK·Filed 2007·Granted Aug 6, 2013·0 cites·8 claims
- 0952US8853050B2Methods of forming capacitorsKIEHLBAUCH MARK·Filed 2012·Granted Oct 7, 2014·0 cites·23 claims
- 1052US8241987B2Methods of forming capacitorsKIEHLBAUCH MARK·Filed 2011·Granted Aug 14, 2012·0 cites·35 claims
- 1151US8207041B2Semiconductor processing methodsKIEHLBAUCH MARK·Filed 2010·Granted Jun 26, 2012·0 cites·24 claims
- 1250US2012068366A1Selective etch chemistries for forming high aspect ratio features and associated structuresKIEHLBAUCH MARK·Filed 2011·Application pending·0 cites
- 1339US8507380B2Methods of forming contact openings and methods of increasing contact area in only one of X and Y axes in the fabrication of integrated circuitryKIEHLBAUCH MARK·Filed 2010·Granted Aug 13, 2013·0 cites·32 claims
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