Inventor · disambiguated record
Keisuke Shigaki
Also filed as: SHIGAKI KEISUKE
3 granted patents·671 citations·filing 1981–1990
80Inventor score
Top patents by PatentIndex Score
3 records- 0195US4812201AMethod of ashing layers, and apparatus for ashing layersTOKYO ELECTRON LTD·Filed 1987·Granted Mar 14, 1989·481 cites·4 claims
- 0278US4455609AApparatus for realtime fast reconstruction and display of dose distributionNIPPON ELECTRIC CO·Filed 1981·Granted Jun 19, 1984·154 cites·3 claims
- 0362US5028955AExposure apparatusTOKYO ELECTRON LTD·Filed 1990·Granted Jul 2, 1991·36 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →