Inventor · disambiguated record
Kenichi Shigetomi
Also filed as: SHIGETOMI KENICHI
7 granted patents·2 pending applications·51 citations·filing 2004–2019
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0186US8138456B2Heat processing method, computer-readable storage medium, and heat processing apparatusFUKUDA YOSHITERU·Filed 2007·Granted Mar 20, 2012·24 cites·19 claims
- 0281US8378272B2Heat treatment apparatus, heat treatment method and storage mediumTOKYO ELECTRON LTD·Filed 2011·Granted Feb 19, 2013·7 cites·5 claims
- 0377US8916804B2Heat treatment method, recording medium having recorded program for executing heat treatment method, and heat treatment apparatusSHIGETOMI KENICHI·Filed 2011·Granted Dec 23, 2014·7 cites·13 claims
- 0467US7049553B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2004·Granted May 23, 2006·12 cites·23 claims
- 0562US10886151B2Heating apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 5, 2021·1 cites·4 claims
- 0653US11476136B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 18, 2022·0 cites·3 claims
- 0746US10504757B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 10, 2019·0 cites·4 claims
- 0839US2015228512A1Substrate treatment method, computer-readable storage medium, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0932US2012031892A1Heat Treatment Method, Recording Medium Having Recorded Program for Executing Heat Treatment Method, and Heat Treatment ApparatusSHIGETOMI KENICHI·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Kenichi Shigetomi files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →