Inventor · disambiguated record
Keita Shouji
Also filed as: SHOUJI KEITA
4 granted patents·1 pending application·0 citations·filing 2020–2022
51Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0148US11742228B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2021·Granted Aug 29, 2023·0 cites·16 claims
- 0246US2023034399A1Substrate processing system and method of processing substrateTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0341US11585717B2Method for calibrating plurality of chamber pressure sensors and substrate processing systemTOKYO ELECTRON LTD·Filed 2020·Granted Feb 21, 2023·0 cites·16 claims
- 0441US11555755B2Method of calibrating multiple chamber pressure sensorsTOKYO ELECTRON LTD·Filed 2021·Granted Jan 17, 2023·0 cites·8 claims
- 0539US11899476B2Method and apparatus for measuring gas flowTOKYO ELECTRON LTD·Filed 2021·Granted Feb 13, 2024·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →