Inventor · disambiguated record
Ken Tokunaga
Also filed as: TOKUNAGA KEN · TOKUNAGA KEN E · TOKUNAGA KEN EDWARD
3 granted patents·274 citations·filing 1996–1997
78Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0193US6039836AFocus ringsLAM RES CORP·Filed 1997·Granted Mar 21, 2000·128 cites·9 claims
- 0287US5812361ADynamic feedback electrostatic wafer chuckLAM RES CORP·Filed 1996·Granted Sep 22, 1998·97 cites·23 claims
- 0369US5904779AWafer electrical discharge control by wafer lifter systemLAM RES CORP·Filed 1996·Granted May 18, 1999·49 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →