Inventor · disambiguated record
Keigo Toyoda
Also filed as: TOYODA KEIGO
7 granted patents·2 pending applications·3 citations·filing 2014–2023
72Inventor score
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0177US11562889B2Plasma processing apparatus and gas introducing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jan 24, 2023·1 cites·12 claims
- 0273US11832373B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 28, 2023·0 cites·20 claims
- 0373US2024049379A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0467US11056370B2Method for processing workpieceTOKYO ELECTRON LTD·Filed 2017·Granted Jul 6, 2021·1 cites·3 claims
- 0564US9818582B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2016·Granted Nov 14, 2017·1 cites·7 claims
- 0657US11470712B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Oct 11, 2022·0 cites·15 claims
- 0751US2023268216A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0843US9728418B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Aug 8, 2017·0 cites·8 claims
- 0937US10163607B2Temperature control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 25, 2018·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →