Inventor · disambiguated record
Keisuke Tsugao
Also filed as: TSUGAO KEISUKE
4 granted patents·1 pending application·1 citations·filing 2015–2022
57Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0156US10022758B2Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jul 17, 2018·1 cites·8 claims
- 0249US12377384B2Substrate processing apparatus and control method of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Aug 5, 2025·0 cites·13 claims
- 0349US10128132B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Nov 13, 2018·0 cites·5 claims
- 0449US2024120204A1Substrate processing apparatus and control method for a substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0542US9842747B2Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Dec 12, 2017·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →