Inventor · disambiguated record
Kenta Tsukagoshi
Also filed as: TSUKAGOSHI KENTA
1 granted patent·2 pending applications·0 citations·filing 2011–2023
11Inventor score
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3 records- 0155US2024337919A1Mask blank, phase shift mask, and method for producing semiconductor deviceHOYA CORP·Filed 2022·Application pending·0 cites
- 0252US2025341771A1Method for manufacturing thin film-equipped substrate, thin film-equipped substrate, method for manufacturing multilayer reflective film-equipped substrate, multilayer reflective film-equipped substrate, reflective mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor deviceHOYA CORP·Filed 2023·Application pending·0 cites
- 0344US8785086B2Reflective mask blank, method of manufacturing the same, and reflective maskHASHIMOTO MASAHIRO·Filed 2011·Granted Jul 22, 2014·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →