Inventor · disambiguated record
Kenji Yada
Also filed as: YADA KENJI
6 granted patents·2 pending applications·11 citations·filing 2014–2025
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0195US11273464B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Mar 15, 2022·10 cites·12 claims
- 0269US2024085813A1Solution treatment apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0365US9669510B2Polishing cleaning mechanism, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Jun 6, 2017·1 cites·9 claims
- 0463US11868057B2Solution treatment apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·0 cites·19 claims
- 0557US12007692B2Nozzle, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Jun 11, 2024·0 cites·15 claims
- 0654US2025308946A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0751US12358016B2Cup, liquid processing apparatus, and liquid processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Jul 15, 2025·0 cites·13 claims
- 0851US10328546B2Polishing cleaning mechanism, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Jun 25, 2019·0 cites·10 claims
Join the waitlist — get patent alerts
Get an alert when Kenji Yada files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →