Inventor · disambiguated record
Keiichi Yahata
Also filed as: Yahata Keiichi
1 granted patent·2 pending applications·3 citations·filing 2017–2024
20Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0177US10593571B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 17, 2020·3 cites·4 claims
- 0255US2024242978A1Substrate processing apparatus and substrate processing apparatus maintenance methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0334US2025218802A1Substrate treatment system and substrate treatment methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →