Inventor · disambiguated record
Kimiya Aoki
Also filed as: AOKI KIMIYA
8 granted patents·5 pending applications·89 citations·filing 1999–2022
86Inventor score
Top patents by PatentIndex Score
13 records- 0188US6869892B1Method of oxidizing work pieces and oxidation systemTOKYO ELECTRON LTD·Filed 2004·Granted Mar 22, 2005·43 cites·9 claims
- 0286US7304003B2Oxidizing method and oxidizing unit for object to be processedTOKYO ELECTRON LTD·Filed 2005·Granted Dec 4, 2007·11 cites·7 claims
- 0382US8122850B2Method and apparatus for processing polysilazane filmHISHIYA SHINGO·Filed 2009·Granted Feb 28, 2012·10 cites·12 claims
- 0467US7926445B2Oxidizing method and oxidizing unit for object to be processedTOKYO ELECTRON LTD·Filed 2007·Granted Apr 19, 2011·2 cites·7 claims
- 0563US7700156B2Method and apparatus for forming silicon oxide filmTOKYO ELECTRON LTD·Filed 2004·Granted Apr 20, 2010·10 cites·14 claims
- 0653US7064084B2Oxide film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Jun 20, 2006·4 cites·6 claims
- 0749US7563481B2Method and apparatus for processing polysilazane filmTOKYO ELECTRON LTD·Filed 2004·Granted Jul 21, 2009·2 cites·15 claims
- 0849US2022139942A1Semiconductor deviceTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0942US6245673B1Method of forming tungsten silicide filmTOKYO ELECTRON LTD·Filed 1999·Granted Jun 12, 2001·7 cites·13 claims
- 1040US2006003542A1Method of oxidizing object to be processed and oxidation systemSUZUKI KEISUKE·Filed 2005·Application pending·0 cites
- 1139US2005241578A1Oxidizing method and oxidizing unit for object to be processedAOKI KIMIYA·Filed 2005·Application pending·0 cites
- 1237US2016259402A1Contact detection apparatus, projector apparatus, electronic board apparatus, digital signage apparatus, projector system, and contact detection methodMASUDA KOJI·Filed 2016·Application pending·0 cites
- 1325US2002020433A1Oxidation apparatus and method of cleaning the sameFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →