Inventor · disambiguated record
Kirby H. Floyd
Also filed as: FLOYD KIRBY · FLOYD KIRBY H · FLOYD KIRBY HANE
14 granted patents·4 pending applications·55 citations·filing 1991–2019
89Inventor score
Top patents by PatentIndex Score
18 records- 0183US7037376B2Backflush chamber cleanAPPLIED MATERIALS INC·Filed 2003·Granted May 2, 2006·23 cites·12 claims
- 0282US7790229B2High resolution substrate holder leveling device and methodAPPLIED MATERIALS INC·Filed 2008·Granted Sep 7, 2010·4 cites·15 claims
- 0380US9922819B2Wafer rotation in a semiconductor chamberAPPLIED MATERIALS INC·Filed 2017·Granted Mar 20, 2018·2 cites·20 claims
- 0479US7572340B2High resolution substrate holder leveling device and methodAPPLIED MATERIALS INC·Filed 2005·Granted Aug 11, 2009·3 cites·18 claims
- 0578US9593419B2Wafer rotation in a semiconductor chamberAPPLIED MATERIALS INC·Filed 2015·Granted Mar 14, 2017·2 cites·11 claims
- 0677US9285168B2Module for ozone cure and post-cure moisture treatmentLUBOMIRSKY DMITRY·Filed 2011·Granted Mar 15, 2016·4 cites·13 claims
- 0764US11302520B2Chamber apparatus for chemical etching of dielectric materialsAPPLIED MATERIALS INC·Filed 2015·Granted Apr 12, 2022·1 cites·9 claims
- 0864US7754282B2Adjusting a spacing between a gas distribution member and a substrate supportAPPLIED MATERIALS INC·Filed 2008·Granted Jul 13, 2010·2 cites·19 claims
- 0959US7413612B2In situ substrate holder leveling method and apparatusAPPLIED MATERIALS INC·Filed 2003·Granted Aug 19, 2008·8 cites·17 claims
- 1052US2015083042A1Rotatable substrate support having radio frequency applicatorAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1151US10460915B2Rotatable substrate support having radio frequency applicatorAPPLIED MATERIALS INC·Filed 2017·Granted Oct 29, 2019·0 cites·20 claims
- 1246US2009120368A1Rotating temperature controlled substrate pedestal for film uniformityAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1346US2009120584A1Counter-balanced substrate supportAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1444US12488967B2Extreme uniformity heated substrate support assemblyAPPLIED MATERIALS INC·Filed 2019·Granted Dec 2, 2025·0 cites·12 claims
- 1540US8524004B2Loadlock batch ozone cureLUBOMIRSKY DMITRY·Filed 2011·Granted Sep 3, 2013·0 cites·10 claims
- 1637US11257693B2Methods and systems to improve pedestal temperature controlAPPLIED MATERIALS INC·Filed 2015·Granted Feb 22, 2022·0 cites·10 claims
- 1736US2012103970A1Heater with independent center zone controlLUBOMIRSKY DMITRY·Filed 2011·Application pending·0 cites
- 1832US5396692ANon-linear torsional assist mechanism and methodFMC CORP·Filed 1991·Granted Mar 14, 1995·6 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →