Inventor · disambiguated record
Kimihiro Fukasawa
Also filed as: FUKASAWA KIMIHIRO
5 granted patents·1 pending application·17 citations·filing 2004–2019
72Inventor score
Top patents by PatentIndex Score
6 records- 0183US9236230B2Plasma processing apparatus and gas supply method thereforKATO YOSHIYUKI·Filed 2012·Granted Jan 12, 2016·3 cites·6 claims
- 0274US10254774B2Temperature control method, control apparatus, and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Apr 9, 2019·4 cites·14 claims
- 0356US7409253B2System and method for processing a substrate and program thereforTOKYO ELECTRON LTD·Filed 2004·Granted Aug 5, 2008·10 cites·19 claims
- 0451US9299540B2Plasma processing apparatus, plasma processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Mar 29, 2016·0 cites·4 claims
- 0545US8864934B2Plasma processing apparatus, plasma processing method, and storage mediumOGI TATSUYA·Filed 2012·Granted Oct 21, 2014·0 cites·5 claims
- 0641US2019304824A1Plasma processing apparatus and method of transferring workpieceTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →