Inventor · disambiguated record
Kiyohito Iijima
Also filed as: IIJIMA KIYOHITO
9 granted patents·4 pending applications·32 citations·filing 2001–2019
83Inventor score
Top patents by PatentIndex Score
13 records- 0192US10403525B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2017·Granted Sep 3, 2019·7 cites·9 claims
- 0285US7245987B2Cluster tool and transfer control methodTOKYO ELECTRON LTD·Filed 2005·Granted Jul 17, 2007·11 cites·4 claims
- 0376US7681055B2Control device and method for a substrate processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Mar 16, 2010·6 cites·15 claims
- 0465US8382910B2Cleaning method for substrate processing system, storage medium, and substrate processing systemTOKYO ELECTRON LTD·Filed 2009·Granted Feb 26, 2013·2 cites·9 claims
- 0559US11069548B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2019·Granted Jul 20, 2021·0 cites·8 claims
- 0659US8145339B2Substrate processing apparatus and substrate transfer method adopted thereinIIJIMA KIYOHITO·Filed 2009·Granted Mar 27, 2012·2 cites·11 claims
- 0751US6983195B2Semiconductor processing system and method of transferring workpieceTOKYO ELECTRON LTD·Filed 2001·Granted Jan 3, 2006·4 cites·13 claims
- 0848US8055368B2Control device and control method of plasma processing system, and storage medium storing control programTOKYO ELECTRON LTD·Filed 2009·Granted Nov 8, 2011·0 cites·10 claims
- 0948US2010089423A1Cleaning method and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1043US7846257B2Method for cleaning substrate processing apparatus, substrate processing apparatus, program and recording medium having program recorded thereinTOKYO ELECTRON LTD·Filed 2006·Granted Dec 7, 2010·0 cites·9 claims
- 1142US2007215180A1Cleaning method of substrate processing equipment, substrate processing equipment, and recording medium for recording program thereofTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1240US2010087944A1Semiconductor manufacturing apparatus, method of managing apparatus operation parameters, and programTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1334US2004043513A1Method of transferring processed body and processing system for processed bodyFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →