Inventor · disambiguated record
Kiyohito Ito
Also filed as: ITO KIYOHITO
8 granted patents·2 pending applications·28 citations·filing 2004–2019
78Inventor score
Top patents by PatentIndex Score
10 records- 0195US9443731B1Material processing to achieve sub-10nm patterningTOKYO ELECTRON LTD·Filed 2015·Granted Sep 13, 2016·21 cites·20 claims
- 0281US9257280B2Mitigation of asymmetrical profile in self aligned patterning etchTOKYO ELECTRON LTD·Filed 2014·Granted Feb 9, 2016·5 cites·13 claims
- 0375US11380545B2Processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jul 5, 2022·2 cites·13 claims
- 0451US10886138B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jan 5, 2021·0 cites·10 claims
- 0546US11728176B2Treatment methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 15, 2023·0 cites·11 claims
- 0646US8232207B2Substrate processing methodOGASAWARA KOSUKE·Filed 2009·Granted Jul 31, 2012·0 cites·12 claims
- 0744US2014284308A1Plasma etching method and plasma etching apparatusTOSHIBA KK·Filed 2014·Application pending·0 cites
- 0839US10950458B2Etching methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 16, 2021·0 cites·9 claims
- 0937US9576812B2Partial etch memorization via flash additionTOKYO ELECTRON LTD·Filed 2016·Granted Feb 21, 2017·0 cites·27 claims
- 1036US2004222190A1Plasma processing methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →