Inventor · disambiguated record
Kirubanandan Naina Shanmugam
Also filed as: SHANMUGAM KIRUBANANDAN NAINA
3 granted patents·2 pending applications·1 citations·filing 2020–2024
48Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0177US12074010B2Atomic layer deposition part coating chamberAPPLIED MATERIALS INC·Filed 2021·Granted Aug 27, 2024·1 cites·67 claims
- 0270US2024420926A1Atomic layer deposition part coating chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0361US12486571B2Atomic layer deposition coating system for inner walls of gas linesAPPLIED MATERIALS INC·Filed 2022·Granted Dec 2, 2025·0 cites·20 claims
- 0448US11848218B2Semiconductor chamber component cleaning systemsAPPLIED MATERIALS INC·Filed 2020·Granted Dec 19, 2023·0 cites·11 claims
- 0537US2023073150A1Heated lid for a process chamberAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Kirubanandan Naina Shanmugam files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →