Inventor · disambiguated record
Kibatsu Shinohara
Also filed as: SHINOHARA KIBATSU
30 granted patents·6 pending applications·519 citations·filing 1990–2014
97Inventor score
Top patents by PatentIndex Score
36 records- 0191US7102110B2Magnetron oscillating apparatusNIHON KOSHUHA CO LTD·Filed 2005·Granted Sep 5, 2006·16 cites·11 claims
- 0290US6043608APlasma processing apparatusNEC CORP·Filed 1997·Granted Mar 28, 2000·73 cites·9 claims
- 0390US5874706AMicrowave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric fieldTOKYO ELECTRON LTD·Filed 1997·Granted Feb 23, 1999·77 cites·22 claims
- 0486US6847003B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Jan 25, 2005·22 cites·17 claims
- 0585US5637961AConcentric rings with different RF energies applied theretoTOKYO ELECTRON LTD·Filed 1995·Granted Jun 10, 1997·77 cites·10 claims
- 0684US5565738APlasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamberNEC CORP·Filed 1995·Granted Oct 15, 1996·53 cites·13 claims
- 0782US6910440B2Apparatus for plasma processingNIHON KOSHUHA CO LTD·Filed 2001·Granted Jun 28, 2005·16 cites·20 claims
- 0876US5900699APlasma generator with a shield interposing the antennaNEC CORP·Filed 1997·Granted May 4, 1999·49 cites·10 claims
- 0974US6657151B2Plasma processing deviceTOKYO ELECTRON LTD·Filed 2001·Granted Dec 2, 2003·10 cites·22 claims
- 1071US8427254B2Ferrite phase shifter and automatic matching apparatusSHINOHARA KIBATSU·Filed 2008·Granted Apr 23, 2013·6 cites·8 claims
- 1170US9419323B2Power combiner/divider of a radial line type impedance matched between a center connector and peripheral outer connectorsNIHON KOSHUHA CO LTD·Filed 2013·Granted Aug 16, 2016·4 cites·8 claims
- 1268US5936352APlasma processing apparatus for producing plasma at low electron temperaturesNEC CORP·Filed 1996·Granted Aug 10, 1999·20 cites·28 claims
- 1364US8840844B2Plasma generating apparatusFUJITA HIDEKI·Filed 2009·Granted Sep 23, 2014·1 cites·6 claims
- 1463US7545226B2Magnetron oscillatorNIHON KOSHUHA CO LTD·Filed 2005·Granted Jun 9, 2009·3 cites·13 claims
- 1563US7296533B2Radial antenna and plasma device using itTOKYO ELECTRON LTD·Filed 2001·Granted Nov 20, 2007·5 cites·8 claims
- 1660US10056671B2Waveguide type power combining/dividing unitNIHON KOSHUHA CO LTD·Filed 2014·Granted Aug 21, 2018·2 cites·6 claims
- 1758US7395779B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Jul 8, 2008·6 cites·17 claims
- 1857US7186314B2Plasma processor and plasma processing methodNIHON KOSHUHA CO LTD·Filed 2004·Granted Mar 6, 2007·5 cites·17 claims
- 1952US2005211382A1Plasma processing apparatusNIHON KOSHUHA CO LTD·Filed 2005·Application pending·0 cites
- 2051US7071442B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jul 4, 2006·1 cites·5 claims
- 2151US5448173ATriple-probe plasma measuring apparatus for correcting space potential errorsNIHON KOSHUHA CO LTD·Filed 1992·Granted Sep 5, 1995·16 cites·5 claims
- 2251US5365147APlasma stabilizing apparatus employing feedback controlsNICHIMEN CO LTD·Filed 1991·Granted Nov 15, 1994·18 cites·5 claims
- 2350US6707253B2Matching circuit and plasma processing apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Mar 16, 2004·2 cites·10 claims
- 2446US2007119376A1Matching device and plasma processing apparatusTOKYO ELECTRON LTD AND NIHON K·Filed 2007·Application pending·0 cites
- 2544US8779873B2Ferrite phase shifter and automatic matching apparatusSHINOHARA KIBATSU·Filed 2012·Granted Jul 15, 2014·0 cites·12 claims
- 2644US5359282APlasma diagnosing apparatusNICHIMEN CO LTD·Filed 1991·Granted Oct 25, 1994·13 cites·7 claims
- 2743US2004261717A1Matching device and plasma processing apparatusFiled 2002·Application pending·0 cites
- 2842US7392760B2Microwave-excited plasma processing apparatusULVAC INC·Filed 2004·Granted Jul 1, 2008·2 cites·1 claims
- 2941US5041803AAutomatic load matching circuit for microwaves using multi-element matching deviceNIHON KOSHUHA CO LTD·Filed 1990·Granted Aug 20, 1991·8 cites·3 claims
- 3040US2006042546A1Plasma processing apparatus and controlling method thereforTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 3139US2007113978A1Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 3237US2004244693A1Electromagnetic field supply apparatus and plasma processing deviceFiled 2002·Application pending·0 cites
- 3331US5542833AApparatus for continuously vulcanizing rubber productKINUGAWA RUBBER IND·Filed 1994·Granted Aug 6, 1996·4 cites·3 claims
- 3430US5328348AControl system for continuous vulcanization line for manufacturing sponge rubber productKINUGAWA RUBBER IND·Filed 1992·Granted Jul 12, 1994·3 cites·8 claims
- 3529US5929570AMicro-wave plasma device with a metal cooling wire wrapped around the insulating tubeNIHON KOSHUHA KABUSHIKI KAISHA·Filed 1998·Granted Jul 27, 1999·6 cites·5 claims
- 3628US5385463AControl system for continuous vulcanization line for manufacturing sponge rubber productKINUGAWA RUBBER IND·Filed 1994·Granted Jan 31, 1995·1 cites·4 claims
Join the waitlist — get patent alerts
Get an alert when Kibatsu Shinohara files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →