Inventor · disambiguated record
Kiyohisa Tateyama
Also filed as: TATEYAMA KIYOHISA
68 granted patents·2 pending applications·3,763 citations·filing 1991–2016
99Inventor score
Top patents by PatentIndex Score
70 records- 0197US6104002AHeat treating apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Aug 15, 2000·388 cites·9 claims
- 0295US5695817AMethod of forming a coating filmTOKYO ELECTRON LTD·Filed 1995·Granted Dec 9, 1997·92 cites·28 claims
- 0394US5871584AProcessing apparatus and processing methodTOKYO ELECTRON LTD·Filed 1997·Granted Feb 16, 1999·162 cites·15 claims
- 0494US5803970AMethod of forming a coating film and coating apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Sep 8, 1998·82 cites·38 claims
- 0594US5718763AResist processing apparatus for a rectangular substrateTOKYO ELECTRON LTD·Filed 1995·Granted Feb 17, 1998·154 cites·7 claims
- 0693US5442416AResist processing methodTOKYO ELECTRON LTD·Filed 1994·Granted Aug 15, 1995·138 cites·66 claims
- 0792US5919520ACoating method and apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 1997·Granted Jul 6, 1999·105 cites·16 claims
- 0892US5202716AResist process systemTOKYO ELECTRON LTD·Filed 1992·Granted Apr 13, 1993·146 cites·11 claims
- 0991US6159288AMethod and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 1997·Granted Dec 12, 2000·57 cites·10 claims
- 1091US5762708ACoating apparatus thereforTOKYO ELECTRON LTD·Filed 1995·Granted Jun 9, 1998·107 cites·14 claims
- 1191US5688322AApparatus for coating resist on substrateTOKYO ELECTRON LTD·Filed 1996·Granted Nov 18, 1997·89 cites·16 claims
- 1290US5375291ADevice having brush for scrubbing substrateTOKYO ELECTRON LTD·Filed 1993·Granted Dec 27, 1994·127 cites·15 claims
- 1387US5834737AHeat treating apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Nov 10, 1998·77 cites·23 claims
- 1487US5374312ALiquid coating systemTOKYO ELECTRON LTD·Filed 1993·Granted Dec 20, 1994·119 cites·7 claims
- 1587US5339128AResist processing methodTOKYO ELECTRON LTD·Filed 1993·Granted Aug 16, 1994·81 cites·30 claims
- 1686US5965200AProcessing apparatus and processing methodTOKYO ELECTRON LTD·Filed 1997·Granted Oct 12, 1999·73 cites·7 claims
- 1785US6837672B1Apparatus for and method of transferring substratesTOKYO ELECTRON LTD·Filed 2000·Granted Jan 4, 2005·26 cites·2 claims
- 1885US6443641B2Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Sep 3, 2002·28 cites·7 claims
- 1984US5645391ASubstrate transfer apparatus, and method of transferring substratesTOKYO ELECTRON LTD·Filed 1995·Granted Jul 8, 1997·75 cites·19 claims
- 2083US5817156ASubstrate heat treatment table apparatusTOKYO ELECTRON LTD·Filed 1995·Granted Oct 6, 1998·69 cites·18 claims
- 2182US5421056ASpin chuck and treatment apparatus using sameTOKYO ELECTRON LTD·Filed 1994·Granted Jun 6, 1995·79 cites·20 claims
- 2281US5252137ASystem and method for applying a liquidTOKYO ELECTRON LTD·Filed 1991·Granted Oct 12, 1993·77 cites·14 claims
- 2380US6207231B1Coating film forming method and coating apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Mar 27, 2001·56 cites·26 claims
- 2480US6090205AApparatus for processing substrateTOKYO ELECTRON LTD·Filed 1998·Granted Jul 18, 2000·50 cites·14 claims
- 2580US5945161AApparatus and method for supplying process solution to surface of substrate to be processedTOKYO ELECTRON LTD·Filed 1997·Granted Aug 31, 1999·60 cites·21 claims
- 2680US5239182AWafer conveyor apparatus and method for detecting inclination of wafer inside cassetteTOKYO ELECTRON SAGA KABUSHIKI·Filed 1992·Granted Aug 24, 1993·79 cites·11 claims
- 2779US6062241ASubstrate conveying device and substrate conveying methodTOKYO ELECTRON LTD·Filed 1998·Granted May 16, 2000·48 cites·6 claims
- 2878US6749688B2Coating method and apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 1999·Granted Jun 15, 2004·47 cites·8 claims
- 2978US6062288AProcessing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted May 16, 2000·52 cites·15 claims
- 3078US5626675AResist processing apparatus, substrate processing apparatus and method of transferring a processed articleTOKYO ELECTRON LTD·Filed 1994·Granted May 6, 1997·64 cites·15 claims
- 3177US6962477B2Apparatus for and method of transferring substratesTOKYO ELECTRON LTD·Filed 2004·Granted Nov 8, 2005·14 cites·2 claims
- 3277US5993518ADeaerating apparatus, deaerating method, and treatment apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Nov 30, 1999·46 cites·22 claims
- 3377US5941083ACooling device and cooling methodTOKYO ELECTRON LTD·Filed 1996·Granted Aug 24, 1999·41 cites·9 claims
- 3477US5250114ACoating apparatus with nozzle moving meansTOKYO ELECTRON LTD·Filed 1991·Granted Oct 5, 1993·61 cites·8 claims
- 3576US6261007B1Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·43 cites·6 claims
- 3676US5970717ACooling method, cooling apparatus and treatment apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Oct 26, 1999·45 cites·34 claims
- 3776US5685039ACleaning apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Nov 11, 1997·51 cites·20 claims
- 3875US6168665B1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Jan 2, 2001·46 cites·9 claims
- 3975US6013317ACoating apparatus and method thereforTOKYO ELECTRON LTD·Filed 1998·Granted Jan 11, 2000·38 cites·12 claims
- 4074US6227786B1Substrate treating apparatusTOKYO ELECTRON LTD·Filed 1998·Granted May 8, 2001·44 cites·15 claims
- 4172US6152677AApparatus for and method of transferring substratesTOKYO ELECTRON LTD·Filed 1998·Granted Nov 28, 2000·32 cites·16 claims
- 4271US6799910B2Processing method and processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Oct 5, 2004·9 cites·17 claims
- 4371US6391110B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted May 21, 2002·15 cites·4 claims
- 4469US6889764B2Cooling device and cooling methodTOKYO ELECTRON LTD·Filed 2001·Granted May 10, 2005·10 cites·3 claims
- 4568US6451515B2Substrate treating methodTOKYO ELECTRON LTD·Filed 1999·Granted Sep 17, 2002·31 cites·10 claims
- 4668US5853961AMethod of processing substrate and apparatus for processing substrateTOKYO ELECTRON LTD·Filed 1996·Granted Dec 29, 1998·29 cites·8 claims
- 4767US7101646B2Developing method and apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Sep 5, 2006·2 cites·4 claims
- 4867US5943880ACooling apparatus, cooling method, and processing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Aug 31, 1999·32 cites·20 claims
- 4967US5813819ASubstrate transfer apparatus, and method of transferring substratesTOKYO ELECTRON LTD·Filed 1997·Granted Sep 29, 1998·32 cites·12 claims
- 5067US5416047AMethod for applying process solution to substratesTOKYO ELECTRON LTD·Filed 1993·Granted May 16, 1995·42 cites·10 claims
Showing the top 50 of 70 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →