Inventor · disambiguated record
Kichul Um
Also filed as: UM KICHUL
3 granted patents·5 pending applications·7 citations·filing 2019–2024
58Inventor score
Files withASM IP HOLDING BV8
Top patents by PatentIndex Score
8 records- 0183US11274369B2Thin film deposition methodASM IP HOLDING BV·Filed 2019·Granted Mar 15, 2022·6 cites·18 claims
- 0273US2025087460A1Substrate processing apparatusASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0369US11414760B2Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the sameASM IP HOLDING BV·Filed 2019·Granted Aug 16, 2022·1 cites·20 claims
- 0460US2022349058A1Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the sameASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0559US12183546B2Substrate processing apparatusASM IP HOLDING BV·Filed 2021·Granted Dec 31, 2024·0 cites·15 claims
- 0657US2025043427A1Wafer processing apparatus with auxiliary ground pathsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0750US2023260754A1Substrate processing method and substrate processing apparatus using the sameASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0848US2022044916A1Substrate processing apparatusASM IP HOLDING BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →