Inventor · disambiguated record

Klaus Funk

Also filed as: FUNK KLAUS

1 granted patent·1 pending application·10 citations·filing 2003–2008

33Inventor score

Technology areasH10P

Files withDEUTSCH ZENTR LUFT & RAUMFAHRT1 MATTSON THERMAL PRODUCTS GMBH1

Top patents by PatentIndex Score

2 records

0152US7098157B2Method and apparatus for thermally treating disk-shaped substratesMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Aug 29, 2006·10 cites·67 claims
0239US2009134146A1Heating blocksDEUTSCH ZENTR LUFT & RAUMFAHRT·Filed 2008·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →